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Optical Micro- and Nanometrology in Manufacturing Technology

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Volume Details

Volume Number: 5458
Date Published: 17 August 2004

Table of Contents
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Three-dimensional dynamic environmental MEMS characterization
Author(s): Erik Novak
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Application of the vortex transform to microscopic interferometry
Author(s): Sylvain Petitgrand; Alain Bosseboeuf; Matthieu Guirardel
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Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions
Author(s): Leszek Salbut; Jacek Kacperski; Adam R. Styk; Michal Jozwik; Christophe Gorecki; Hakan Urey; Alain Jacobelli; Thierry Dean
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Analysis of static and dynamic operational behavior of active micromembranes
Author(s): Petra Aswendt; Thierry Dean
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Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy
Author(s): Paul C. Montgomery; Denis Montaner; Omar Manzardo; Hans-Peter Herzig
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Metrology of refractive microlens arrays
Author(s): Kenneth J. Weible; Reinhard Volkel; Martin Eisner; Samuel Hoffmann; Toralf Scharf; Hans-Peter Herzig
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Tomographic microinterferometry of refractive index distribution
Author(s): Pawel Kniazewski; Malgorzata Kujawinska; Heidi Ottevaere; Hugo Thienpont
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Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer
Author(s): Pasquale Maddaloni; Giuseppe Coppola; Paolo de Natale; Sergio de Nicola; Pietro Ferraro; Mariano Gioffre; Mario Iodice
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Application on multichannel V-groove inspection
Author(s): Chongxiang Li; Anand Krishna Asundi; Zhong Ping Fang
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Makyoh topography: a simple yet powerful optical method for flatness and defect characterization of mirror-like surfaces
Author(s): Ferenc Riesz
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Real-time measurement of microscopic surface shape using high-speed cameras with continuously scanning interference microscopy
Author(s): Paul C. Montgomery; Cemal Draman; Wilfried Uhring; Francois Tomasini
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Scanning diffraction microscopy: far-field microscopy by interferometry and diffraction combination
Author(s): Stefano Selci
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Real-time shape measurement system including CG output
Author(s): Yoshiharu Morimoto; Motoharu Fujigaki; Rodolphe Saugier
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Performance of a multifiber polarimetric strain sensor
Author(s): Gopalkrishna M. Hegde; Eluska Sukia; Lim Choo Min; Anand Krishna Asundi
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Holographic interferometry deformations metrology by using AR modeling
Author(s): Rabah Mokdad; Idriss El-Hafidi; Patrick Meyrueis
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Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization
Author(s): Andrei Sabac; Christophe Gorecki; Michal Jozwik; Thierry Dean; Alain Jacobelli
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Sensitivity-tunable interferometric system based on surface plasmon resonance
Author(s): Chien-Ming Wu; Ming-Chi Pao
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Near-field scanning photoluminescence microscopy of InGaN/GaN quantum structures
Author(s): Sudhiranjan Tripathy; Soo Jin Chua
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Near-field optical measurements using rare-earth-doped glass-ceramic particles
Author(s): Lionel Aigouy; Michel Mortier; Yannick De Wilde; Jacques Gierak; Eric Bourhis
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Study of the roughness and optical near field of mass surface by using a SNOM with shear-force regulation
Author(s): Youssef Haidar; Frederique de Fornel; Chouki Zerouki; Patrick Pinot
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A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity
Author(s): Christophe Gorecki; Dominique Heinis
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Evolutionary approach to an inverse problem in near-field optics microscopy
Author(s): Demetrio Macias; Dominique Barchiesi; Alexandre Vial
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Optical characterization of micro-electro-mechanical structures
Author(s): Valerio Annovazzi-Lodi; Mauro Benedetti; Sabina Merlo; Michele Norgia; Benedetto Vigna; Simone Sassolini
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Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method
Author(s): Krzysztof Patorski; Zbigniew Sienicki; Michal Pawlowski; Adam R. Styk; Agata Józwicka
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Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry
Author(s): Xiaoping Wu; Zhaotao Liu; Hong Miao; Ping Gu
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Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor
Author(s): Giuseppe Coppola; Sergio De Nicola; Pietro Ferraro; Andrea Finizio; Piera Maccagnani; Giovanni Pierattini
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Hybrid analysis of micromachined silicon thin film based on digital microscopic holography
Author(s): Lei Xu; Xiaoyuan Peng; Jianmin Miao; Anand Krishna Asundi
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An optical workstation for characterization and modification of MEMS
Author(s): John Hedley; Jim S. Burdess; Alun J. Harris; Barry J. Gallacher; Calum J. McNeil; Peter J. Cumpson; Stefan Enderling
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Singular Stokes-polarimetry as new technique for metrology and inspection of polarized speckle fields
Author(s): Marat S. Soskin; Vladimir G. Denisenko; Roman I. Egorov
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A plastic fiber polarimetric sensor for dynamic applications
Author(s): Gopalkrishna M. Hegde; E. Purnomo; E. L. Ang; Andrew Thurairaja Sabaratnam; Anand Krishna Asundi
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Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations
Author(s): Bruno Serio; Jean-Jacques Hunsinger; Bernard Cretin
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Femtosecond ablation scaling for different materials
Author(s): Peggy Gonzales; Robert Bernath; Joshua Duncan; Ty Olmstead; Martin Richardson
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Frequency measurement of refraction index of air for high-resolution laser interferometry
Author(s): Ondrej Cip; Frantisek Petru; Vit Matousek; Josef Lazar
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Photopolymerization-induced materialization of the dipolar response from isolated metallic nanoparticles
Author(s): Gregory Wurtz; Dominique Burget; Christiane Carre
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Modified linear and circular carrier-frequency Fourier-transform method applied for studies of vibrating microelements
Author(s): Jacek Kacperski; Malgorzata Kujawinska; Jerzy Krezel
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