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Micromachining Technology for Micro-Optics and Nano-Optics II

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Volume Details

Volume Number: 5347
Date Published: 29 December 2003

Table of Contents
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At the limit of nondispersive micro- and nanofocusing mirror optics
Author(s): Gene E. Ice; Eliot David Specht; Jonathan Z. Tischler; Ali M. Khounsary; Lahsen Assoufid; Chian Liu
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Design and fabrication of advanced EUV diffractive elements
Author(s): Patrick P. Naulleau; James Alexander Liddle; Farhad Salmassi; Erik H. Anderson; Eric M. Gullikson
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Femtosecond laser microstructuring and refractive index modification applied to laser and photonic devices
Author(s): Martin C. Richardson; Arnaud Zoubir; Clara Rivero; Cedric Lopez; Laeticia C. Petit; Kathleen A. Richardson
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Gray-scale fabrication of micro-optics in bulk zinc selenide and bulk multispectral zinc sulfide
Author(s): Gregg T. Borek; Daniel M. Brown; Jared A. Shafer
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Diamond optics: fabrication and applications
Author(s): Fredrik K. Nikolajeff; Mikael Karlsson
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Developments in Si and SiO2 etching for MEMS-based optical applications
Author(s): Lee Adrian Donohue; Janet Hopkins; Richard Barnett; Andrew Newton; Anthony Barker
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Developments in SiO2 multistep diffractive optical element for beam homogenizing
Author(s): Kenichi Kurisu; Takeshi Okada; Keiji Ebata
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Analog micro-optics fabrication by use of a binary phase grating mask
Author(s): Jinwon Sung; Mahesh Pitchumani; Jeremiah Brown; Heidi Hockel; Eric G. Johnson
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Design of continuous full-complex modulation proximity printing masks using a quadratic phase distribution
Author(s): Luiz Goncalves Neto; Giuseppe Antonio Cirino; Ronaldo Domingues Mansano; Patrick Verdonck; Antonio Carlos Seabra
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MEMS-based lithography for the fabrication of micro-optical components
Author(s): Lars H. Erdmann; Arnaud Deparnay; Falk Wirth; Robert Brunner
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Presculpting of photoresists using additive lithography
Author(s): Mahesh Pitchumani; Waleed S. Mohammed; Heidi Hockel; Eric G. Johnson
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Design and fabrication of sol-gel microlens array as a fiber-to-fiber and fiber-to-waveguide coupler
Author(s): Weixing Yu; Xiaocong Yuan; Nam Quoc Ngo; Vladimir Kudryashov
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Thick microlens array fabricated by soft lithography in hybrid sol-gel glass
Author(s): XiaoCong Yuan; Weixing Yu; Vladimir Kudryashov; Ken-Jin Moh; Nam Quoc Ngo
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High-sensitivity material systems for two-photon three dimensional microfabrication
Author(s): Stephen M. Kuebler; Joseph W. Perry; Seth R. Marder; Christopher Kemper Ober; Kevin L. Braun; Tianyue Yu; Wenhui Zhou
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Novel inter-core-cladding lithium niobate thin-film-coated fiber modulator/sensor
Author(s): Tracee L Jamison; Philip Kornriech; Chung Yu
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Formation of complex wavefronts by use of quasiperiodic subwavelength structures
Author(s): Avi Niv; Gabriel Biener; Vladimir Kleiner; Erez Hasman
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Monolithic integration of optical waveguides and MEMS-based switching in silicon-on-insulator
Author(s): Howie R. Stuart; Frieder H. Baumann; Annjoe Wong-Foy
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Microfabrication technologies for missile components
Author(s): Tracy Dean Hudson; Paul R. Ashley; Mark G. Temmen; Michael S. Kranz; Milan Buncick; Eric Tuck; Deanna K. McMillen
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Proton beam writing of passive polymer optical waveguides
Author(s): Tze Chien Sum; Andrew A. Bettiol; Soma Venugopal Rao; Jeroen Anton van Kan; Akkipeddi Ramam; Frank Watt
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Microfabrication of chiral optic materials and devices
Author(s): Mark A Summers; Scott Kennedy; Anastasia Elias; Martin Jensen; Ken Harris; Brian Szeto; Michael J Brett
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Fabrication of 3D photonic crystals with embedded defects
Author(s): Janusz Murakowski; Garrett J. Schneider; Dennis W. Prather
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Laser microfabrication of photonic crystal structures on silicon wafers
Author(s): Qiying Chen; Suwas Nikumb
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Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology
Author(s): Sriram Venkataraman; Janusz Murakowski; Garrett J. Schneider; Dennis W. Prather
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Fabrication of passively aligned micro-optics using focused ion beam
Author(s): Waleed S. Mohammed; Eric G. Johnson
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Surface plasmons for nanofabrication
Author(s): Pieter G. Kik; Stefan A. Maier; Harry A. Atwater
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Fabrication of three-dimensional photonic crystals using lithographic processes
Author(s): Dennis W. Prather; Yao Peng; Garrett J. Schneider; Janusz Murakowski
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Micro-optic enhancement and fabrication through variable in-plane index of refraction (VIPIR) engineered silicon nanocomposite technology
Author(s): Ronald M. Kubacki
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Inadvertent and intentional subwavelength surface texture on micro-optical components
Author(s): Shanalyn A. Kemme; David W. Peters; Tony R. Carter; Sally Samora; Douglas S. Ruby; Saleem H. Zaidi
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Fabrication of micro-optical components in polymer using proton beam writing
Author(s): Andrew A. Bettiol; Kambiz Ansari; Tze Chien Sum; Jeroen Anton van Kan; Frank Watt
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Fabrication of silicon microstructures using a high-energy ion beam
Author(s): Ee Jin Teo; Minghui Liu; Mark Brian Howell Breese; Emmanuel P. Tavernier; Andrew A. Bettiol; Daniel John Blackwood; Frank Watt
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Si3N4-based photonic crystal membranes
Author(s): Samir Ilias; Bruno Bourliguet; Claude Pare; Alex Paquet; Christine Alain; Hubert Jerominek
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Fabrication of ball-type spherical microlens array for optical fiber coupling
Author(s): Ying-Ruel Huang; Hwai-Pwu Chou
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