Share Email Print


Microsystems Engineering: Metrology and Inspection

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 4400
Date Published: 23 October 2001

Table of Contents
show all abstracts | hide all abstracts
Application of digital holography for the inspection of microcomponents
Author(s): Wolfgang Osten; Soenke Seebacher; Werner P. O. Jueptner
Show Abstract
Three-dimensional device characterization by high-speed cinematography
Author(s): Claus Maier; Eberhard P. Hofer
Show Abstract
Microphotogrammetry for 3D strain measurement and microassembly control
Author(s): Rainer Tutsch; Reinhold Ritter; Diana Ispas; Marcus Petz; Leobaldo Casarotto
Show Abstract
Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry
Author(s): Alain Bosseboeuf; Philippe Nerin; Pascal Vabre; Sylvain Petitgrand; Reda Yahiaoui
Show Abstract
Inspection system for MEMS characterization on wafer level using ESPI
Author(s): Petra Aswendt; Claus-Dieter Schmidt; Dirk Zielke; Steffen Schubert
Show Abstract
Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization
Author(s): Sylvain Petitgrand; Reda Yahiaoui; Alain Bosseboeuf; Kamran Danaie
Show Abstract
Characterization of thin film MEMS using photo-acoustic microscopy
Author(s): Carmen M. Hernandez; Todd W. Murray; Sridhar Krishnaswamy
Show Abstract
Paraboloidal ellipsometer with accurate retardance and latitude
Author(s): Jiun-Yan Wu; Shuen-Chen Shiue; Chih-Kung Lee; Solomon J. H. Lee
Show Abstract
High-resolution measurement of thin metallic films and multilayers by femtosecond laser pulses
Author(s): Jacqueline Vollmann; Dieter Michael Profunser; Jurg Dual
Show Abstract
Quantitative optical measurement of microcantilever vibration: applications to near-field microsensor
Author(s): Pascal Vairac; Rodrigue Rousier; Raphail Patois; Bernard Cretin
Show Abstract
Resolution improvement of pulsed laser experiments with a micro-optomechanical focusing tip
Author(s): Dieter Michael Profunser; Jacqueline Vollmann; Jurg Dual
Show Abstract
Fabrication of multilayer GaAlAs/GaAs microtips for VCSEL-based optical near-field sensors
Author(s): Christophe Gorecki; Sabry Khalfallah
Show Abstract
Fully integrated on-chip laboratories for MEMS-based material and structure mechanical analysis
Author(s): Patrice Minotti
Show Abstract
Optical measurement methods to study dynamic behavior in MEMS
Author(s): Christian Rembe; Rishi Kant; Richard S. Muller
Show Abstract
Waveguide microinterferometry system for microelements investigation
Author(s): Leszek A. Salbut; Michal Jozwik; Christophe Gorecki; Seung Seoup Lee
Show Abstract
New measurement system for microscopic formtesting of microstructures by means of multiple-wavelength interferometry
Author(s): Karsten Schneefuss; Tilo Pfeifer
Show Abstract
Microfabricated ZnSe diffractive optical elements for CO2 laser
Author(s): Keiji Ebata; Keiji Fuse; Kenichi Kurisu; Takeshi Okada; Takayuki Hirai; Hirokuni Nanba
Show Abstract
Automated interferometric system for bulge and blister test measurements of micromachined membranes
Author(s): Reda Yahiaoui; Kamran Danaie; Sylvain Petitgrand; Alain Bosseboeuf
Show Abstract
Mechanical properties of polarimetric smart structures
Author(s): Witold Konopka; Tomasz R. Wolinski; Grzegorz Dymny
Show Abstract

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?