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Micromachining Technology for Micro-Optics
Editor(s): Sing H. Lee; Eric G. Johnson

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Volume Details

Volume Number: 4179
Date Published: 18 August 2000

Table of Contents
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Micro-optics development in the past decade
Author(s): Haluk O. Sankur; M. Edward Motamedi
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Beam-shaping elements for holographic applications
Author(s): Ernst-Bernhard Kley; Matthias Cumme; Lars-Christian Wittig; Mike Thieme; Werner Gabler
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Fabrication technologies for micro-optical elements with arbitrary surfaces
Author(s): Andreas Schilling; Philippe Nussbaum; Irene Philipoussis; Hans Peter Herzig; Laurent Stauffer; Markus Rossi; Ernst-Bernhard Kley
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Micro-optical elements fabricated with single step
Author(s): Lin Pang; Deer Yi; Yingbai Yan; Guofan Jin; Minxian Wu
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3D, high-resolution deep x-ray absorber mask
Author(s): Niculae Dumbravescu; Luminita Grigore
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Silica-like microstructures by x-ray irradiation of polymethylsilsesquioxane spin-on glass films
Author(s): Vijay-Anandh Shanmugam; Michael J. Vasile; Philip J. Coane
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Fabrication of micro-optical components by high-precision embossing
Author(s): Thomas Otto; Andreas Schubert; Juliana Boehm; Thomas Gessner
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Fabrication of microlens arrays in CaF2 by ion milling
Author(s): Dieter Flamm; Axel Schindler; Torsten Harzendorf; Ernst-Bernhard Kley
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Micromachined optical concentrators for IR LEDs
Author(s): Geoff R. Nash; Tim Ashley; David T. Dutton; Neil T. Gordon; T. J. Phillips
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Fabrication of refractive microlens array by etching ammonium dichromate gelatin (ADG) with enzyme
Author(s): Jun Yao; Fuhua Gao; Feng Gao; Yixiao Zhang; Jingqin Su; Yongkang Guo; Zheng Cui
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Refractive microlenses for ultraflat photolithographic projection systems
Author(s): Reinhard Voelkel; Martin Eisner; Christian Ossmann; Kenneth J. Weible
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Polymer UV-molding for micro-optical systems and O/E-integration
Author(s): Peter Dannberg; Gunnar Mann; Lars Wagner; Andreas H. Braeuer
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Miniaturized objective lens for a photoelectron emission microscope
Author(s): Laurence Singleton; Yannick Ansel; Ralf Baron; Gebhard H.L. Marx; Matthias Nienhaus; Felix Schmitz; Gerd Schoenhense; Andreas Schmidt
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Experimental realization of a diffractive optical isolator
Author(s): Tilman Glaser; Siegmund Schroeter; Hartmut Bartelt; Hans-Joerg Fuchs; Ernst-Bernhard Kley
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Approach to higher reliability in 3D micromechanisms
Author(s): Narito Shibaike; Hiroyuki Takeuchi; Kunihiko Nakamura; Norisato Shimizu
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MEMS/MOEMS for lightwave networks: Can little machines make it big?
Author(s): David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; Jim A. Walker
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Bulk micromachining for sensors and actuators
Author(s): Masayoshi Esashi
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Microsystems for diverse applications using recently developed microfabrication techniques
Author(s): Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij
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