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MOEMS and Miniaturized Systems

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Volume Details

Volume Number: 4178
Date Published: 22 August 2000

Table of Contents
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Materials impacts on micro-opto-electro-mechanical systems
Author(s): William D. Cowan
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Latching-type 2x2 and 1x4 fiber-optic switches
Author(s): Peter Kopka; Martin Hoffmann; Edgar I. Voges
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Status of the development of a 128x128 microshutter array
Author(s): Samuel Harvey Moseley Jr.; Rainer K. Fettig; Alexander S. Kutyrev; Mary J. Li; David Brent Mott; Bruce E. Woodgate
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Hybrid MOEMS approaches for fiber optic switches and switch matrices
Author(s): Rolf Goering; Frank Wippermann; Kay Kubitz
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Optical 2x2 switch matrix with electromechanical micromotors
Author(s): Antonio Ruzzu; Dirk Haller; Juergen Mohr; Ulrike Wallrabe
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Design and realization of a novel polymer-based single-mode integrated optical beam splitter
Author(s): Sven Krueger; Hans-Dieter Bauer; Thomas Paatzsch; Anne Gaudron; Martin Popp; Ingo Smaglinski; Wolfgang Ehrfeld
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Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration
Author(s): David L. Dickensheets; Phillip A. Himmer; Robert A. Friholm; B. Jeffrey Lutzenberger
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Improvement of microtorsional mirror for high-frequency scanning
Author(s): Hung-Yi Lin; Ming-Tsing Wu; Weileun Fang
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Scanning silicon micromirror using a bidirectionally movable magnetic microactuator
Author(s): Hyoung J. Cho; Jun Yan; Stephen T. Kowel; Fred Richard Beyette Jr.; Chong Hyuk Ahn
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Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors
Author(s): Harald Schenk; Peter Duerr; Detlef Kunze; Hubert K. Lakner; Heinz Kueck
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Pivoting micromirror designs for large orientation angles
Author(s): Ernest J. Garcia
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Development of modules for micro-optical integration and MOEMS packaging
Author(s): Karl-Heinz Brenner
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MOEMS arrays for interconnect applications
Author(s): James Castracane; Bai Xu; Christian Baks; Mikhail A. Gutin; Olga N. Gutin
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Assembly processes for micro-optical beam transformation systems for high-power diode laser bars and stacks
Author(s): Claudia Gaertner; Veit Bluemel; Bernd Hoefer; Anke Kraeplin; Torsten Possner; Peter Schreiber
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Advantages of scanned-beam MOEMS approach to microdisplay and related applications
Author(s): Todd R. McIntyre; Thor D. Osborn; Radu G. Andrei
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Thermally actuated microprojector for optical display applications
Author(s): Sandra Schweizer; Peter Cousseau; Sebastien Schiesser; Gerhard Lammel; Sam Calmes; Philippe Renaud
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Optical performance requirements for MEMS-scanner-based microdisplays
Author(s): Hakan Urey; David W. Wine; Thor D. Osborn
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Performance of a biaxial MEMS-based scanner for microdisplay applications
Author(s): David W. Wine; Mark P. Helsel; Lorne Jenkins; Hakan Urey; Thor D. Osborn
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Metrology for laser-structured microdevices by CCD-camera-based vision systems
Author(s): Andreas Ostlender; Udo Puetz; Ernst-Wolfgang Kreutz
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Optical sensing of microsystem motion and performance
Author(s): Scott C. Holswade; Fred M. Dickey
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MEMS feedback control using through-wafer optical device monitoring
Author(s): Jeremy M. Dawson; Limin Wang; Jingdong Chen; Parviz F. Famouri; Lawrence Anthony Hornak
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MEMS/MEOMS: metrology and machine vision
Author(s): Rick Conner
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Fabrication of the moving liquid mirror (MLM) spatial light modulator in a standard CMOS process
Author(s): Alexander Wolter; Hubert K. Lakner; Heinz Kueck; Wolfgang Doleschal; Kay-Uwe Kirstein; Andreas Rieck; Kai Frohberg
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MEMS actuators for silicon micro-optical elements
Author(s): Norman C. Tien; David T. McCormick
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Surface-micromachined mirrors for scalable fiber optic switching applications
Author(s): Uma Krishnamoorthy; Paul M. Hagelin; Jonathan Paul Heritage; Olav Solgaard
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Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications
Author(s): Xuming Zhang; F. Chollet; Fook Siong Chau; Chenggen Quan; Ai Qun Liu
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Design and fabrication of optical microcavities using III-V semiconductor-based MOEMS
Author(s): Pierre Viktorovitch; Jean Louis Leclercq; Eric Goutain; D. Rondi
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New design for an integrated Fourier transform spectrometer
Author(s): Omar Manzardo; Hans Peter Herzig; Benedikt Guldimann; Cornel Marxer; Nico F. de Rooij
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Lucent Microstar micromirror array technology for large optical crossconnects
Author(s): Vladimir A. Aksyuk; Flavio Pardo; Cristian A. Bolle; Susanne Arney; C. Randy Giles; David J. Bishop
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Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter
Author(s): Jonathan L. Kuhn; Richard B. Barclay; Matthew A. Greenhouse; David Brent Mott; Shobita Satyapal
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Micromirrors and micromirror arrays for scanning applications
Author(s): Thomas Gessner; Steffen Kurth; Christian Kaufmann; Joachim Markert; Andreas Ehrlich; Wolfram Doetzel
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Micromirror arrays for wavefront correction
Author(s): Andreas Gehner; Michael Wildenhain; Hubert K. Lakner
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Test system for micromirror arrays
Author(s): Peter Duerr; Thomas Tanneberger; Alexander Wolter; Wolfram Kluge; Wolfgang Doleschal; Hubert K. Lakner
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Development of individually addressable micromirror arrays for space applications
Author(s): Sanghamitra B. Dutta; Audrey J. Ewin; Murzy D. Jhabvala; Carl A. Kotecki; Jonathan L. Kuhn; David Brent Mott
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Design and fabrication of optical-MEMS pressure sensor arrays
Author(s): Samhita Dasgupta; Jie Zhou; J. Mitch Wolff; Howard E. Jackson; Joseph T. Boyd
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MOEMS pressure sensors for propulsion applications
Author(s): Joseph T. Boyd; Samhita Dasgupta; Howard E. Jackson
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Control and shape design of an electrically damped comb drive for digital switches
Author(s): Yijian Chen
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Positioning strategies and sensor integration in tools for assembling MOEMS
Author(s): Gunther Reinhart; Dirk Jacob
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Integrated optical motion detection microsystem with programmable resolution
Author(s): Anton Pletersek; Janez Trontelj
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Low-cost microspectrometer
Author(s): Gerhard Lammel; Sandra Schweizer; Philippe Renaud
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MEMS/MOEMS for lightwave networks: Can little machines make it big?
Author(s): David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; Jim A. Walker
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Bulk micromachining for sensors and actuators
Author(s): Masayoshi Esashi
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Microsystems for diverse applications using recently developed microfabrication techniques
Author(s): Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij
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