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Micromachined Devices and Components VI
Editor(s): Eric Peeters; Oliver Paul

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 4176
Date Published: 15 August 2000

Table of Contents
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Review of viscous damping in micromachined structures
Author(s): Gary X. Li; Henry G. Hughes
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High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution
Author(s): Robert A.F. Zwijze; Remeo J. Wiegerink; G. J. M. Krijnen; J. W. Berenschot; Meint J. de Boer; Miko C. Elwenspoek
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Deep cavity-shaped diaphragm for enhancement of microphone mechanical sensitivity
Author(s): Xinxin Li; Rongming Lin; Huatsoon Kek
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Dual beam-mass structure gyroscope micromachined by deep RIE process
Author(s): Heng Yang; Minhang Bao; Hao Yin; Shaoqun Shen
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New fabrication techniques for high dynamic range tunneling sensors
Author(s): David T. Chang; Fred P. Stratton; Randall L. Kubena; Deborah J. Vickers-Kirby; Richard J. Joyce; Thomas R. Schimert; Roland W. Gooch
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Micromechanical detectors for ferromagnetic resonance spectroscopy
Author(s): John Moreland; Pavel Kabos; Albrecht Jander; Markus Loehndorf; Robert McMichael; Chan-Gyu Lee
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Microresonator modified as magnetic sensor
Author(s): S. G. Lokhre; Prakash R. Apte; R. Raajeev; R. Lal
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Toward thermal flow-sensing with pL/s resolution
Author(s): Niels R. Tas; Theo S. J. Lammerink; Pele J. Leussink; J. W. Berenschot; H. E. de Bree; Miko C. Elwenspoek
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AirJet paper mover: an example of mesoscale MEMS
Author(s): David K. Biegelsen; Andrew A. Berlin; Patrick Cheung; Markus P.J. Fromherz; David Goldberg; Warren B. Jackson; Bryan Preas; James Reich; Lars E. Swartz
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Spiral wound transducer
Author(s): Paul C. Elliott; Stephen M. Bobbio; Michael A. Pennington; Stephen W. Smith; Jason M. Zara; John A. Hudak; Jennifer Pagan; Buchanan J. Rouse
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Large deflection of out-of-plane magnetic actuators using surface micromachining
Author(s): J.-M. Huang; Kim Miao Liew; Ai Qun Liu
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Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators
Author(s): Peter B. Allen; Noah C. Boydston; Jeffrey T. Howard; Simon Y. Ko; Edward S. Kolesar Jr.; Matthew D. Ruff; Josh M. Wilken; Richard J. Wilks
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From research to product: the CMOS MEMS case
Author(s): Henry Baltes
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Investigation of thermopile using CMOS compatible process and front-side Si bulk etching
Author(s): Chen-Hsun Du; Cheng-Kuo Lee
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MEMS device for mass market gas and chemical sensors
Author(s): Brian R. Kinkade; James T. Daly; Edward A. Johnson
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Rapid micro-PCR system for hepatitis C virus amplification
Author(s): Yu-Cheng Lin; Ming-Yuan Huang; Kung-Chia Young; Ting-Tsung Chang; Ching-Yi Wu
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Prospective applications of MEMS in wireless communications
Author(s): Hector J. De Los Santos
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Optimization of surface-micromachined patch antenna
Author(s): S. M. Wong; Ban Leong Ooi; Pang Shyan Kooi; Tiong-Huat Ng; Ai Qun Liu
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High frequency of micromechanical resonator via structural modification
Author(s): Yee Chong Loke; Q. Zou; Kim Miao Liew; Ai Qun Liu
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Nano-spring arrays for high-density interconnect
Author(s): David K. Fork; Christopher L. Chua; Patrick Kim; Linda T. Romano; Rachel Lau; Lai Wong; Andrew Alimonda; Vicki Geluz; Mark Teepe; Joe Haemer; Mitul B. Modi; Qi Zhu; Dennis L. Ma; Suresh Sitaraman; Donald L. Smith; Sammy Mok
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Wafer-level surface-mountable chip size packaging for MEMS and ICs
Author(s): Stephane Renard
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Development of silicon ultrasonic transducer using micromachining
Author(s): Giosue Caliano; Fabio Galanello; Vittorio Foglietti; Elena Cianci; Alessandro Caronti
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Low-power micromachined structures for gas sensors with improved robustness
Author(s): Isabel Gracia; Andreas Goetz; Jose Antonio Plaza; Carles Cane; Patrice Roetsch; Harald Boettner; Klaus Seibert
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Planar latch-up microactuator driven by thermoelastic force
Author(s): Jong-Hyun Lee; Myung-Lae Lee; Won-Ick Jang; Chang-Auck Choi; Youn Tae Kim
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Novel technique of thin photoresist micromachining for submillimeter wave circuits
Author(s): Wai Yip Liu; A. Harkar
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MEMS/MOEMS for lightwave networks: Can little machines make it big?
Author(s): David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; James A. Walker
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Bulk micromachining for sensors and actuators
Author(s): Masayoshi Esashi
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Microsystems for diverse applications using recently developed microfabrication techniques
Author(s): Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij
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