Share Email Print


Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays
Editor(s): John C. Stover

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 3619
Date Published: 29 March 1999

Table of Contents
show all abstracts | hide all abstracts
Cross-linking thin film characterization technique for data storage, semiconductor, and flat panel display devices
Author(s): Iris Bloomer; Dale A. Harrison; Shiva Prakash; Kai Zhang; Sean Lian
Show Abstract
Measurements of thin film disks by surface reflectance analysis
Author(s): David Klein; Gerard H. Vurens
Show Abstract
Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers
Author(s): Gerard H. Vurens; David Klein
Show Abstract
Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MS
Author(s): Mark J. Camenzind; Latif Ahmed; Anurag Kumar
Show Abstract
MR glide inspection for hard disk defect detection
Author(s): Michael E. Boyd; Xiaopeng Xu
Show Abstract
Modeled and measured scatter from vias
Author(s): John C. Stover; Craig A. Scheer; Vladimir I. Ivakhnenko; Yuri A. Eremin; Natalia Grishina
Show Abstract
Measurement of scatter from PSL standard spheres deposited on disk surfaces
Author(s): Craig A. Scheer; John C. Stover
Show Abstract
Polarization of light scattered by particles on silicon wafers
Author(s): Lipiin Sung; George W. Mulholland; Thomas A. Germer
Show Abstract
High-speed interferometric aluminum disk blank tester
Author(s): Artur G. Olszak; Ken Stumpe; Raymond M. Copenhaver; George Z. Angeli
Show Abstract
Laser Fizeau interferometer for silicon wafer site flatness testing
Author(s): Erik Novak; Artur G. Olszak; Ken Stumpe; Robert E. Knowlden; Leonid Malevanchik; George Z. Angeli
Show Abstract
Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans
Author(s): Hendrik Rothe; Dorothee Hueser; Andre Kasper; Thomas Rinder
Show Abstract
Roughness characterization of ultrasmooth surfaces using common-path interferometry
Author(s): Baishi Wang; S. P. Marchese-Ragona; Thomas C. Bristow
Show Abstract
TIS, AFM, interferometry, and optical profiler correlation of surface roughness on silicon wafers
Author(s): Patrick A. Taylor; Dean J. Dawson
Show Abstract
BeamM2AP: real-time focus, alignment, and M2 measurement of tightly focussed laser beams
Author(s): Andrew D. MacGregor; Steven E. Garvey
Show Abstract

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?