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Micromachined Devices and Components II
Editor(s): Kevin H. Chau; Ray M. Roop

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Volume Details

Volume Number: 2882
Date Published: 17 September 1996

Table of Contents
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New developments in the integration of micromachined sensors
Author(s): Pasqualina M. Sarro; Patrick J. French; Paul T. J. Gennissen
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Compatible CMOS microsystems for automotive and medical applications
Author(s): Ralf Kersjes; W. Mokwa
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Stacked multichip-module technology for high-performance intelligent transducers
Author(s): Siebe Bouwstra
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Thermopneumatical micropump and microvalves for a medical analyzing system
Author(s): Zouhair Sbiaa; Henri Camon; Daniel Esteve
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Applications of bipolar compatible epitaxial polysilicon
Author(s): Paul T. J. Gennissen; Patrick J. French
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Silicon integrated microsensor incorporating a metal-doped phthalocyanine organic semiconductor used to selectively detect nitrogen dioxide and an organophosphorus compound
Author(s): Edward S. Kolesar Jr.; John M. Wiseman
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Deflection behavior of Fabry-Perot pressure sensors having planar and corrugated membrane
Author(s): Jaeheon Han; Dean P. Neikirk
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Technologies and microstructures for separation techniques in chemical analysis
Author(s): Vincent L. Spiering; Theo S. J. Lammerink; Henri V. Jansen; Jan H. Fluitman; Albert van den Berg
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Antenna-coupled rectifying diode for IR detection
Author(s): Hideaki Yamagishi; Hitoshi Hara; Nobuhiko Kanbara; Yasushi Onoe; Naoki Kishi
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Micromachined VO2-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics
Author(s): Hubert Jerominek; Martin Renaud; Nicholas R. Swart; Francis Picard; Timothy D. Pope; Marc Levesque; Mario Lehoux; Ghislain Bilodeau; Martin Pelletier; Danick Audet; Philippe Lambert
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Optimization of CMOS infrared detector microsystems
Author(s): Niklaus Schneeberger; Oliver Paul; Henry Baltes
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Silicon accelerometers: generic design and operating principles and a case study
Author(s): Eric Peeters
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Stress-induced warpage and the compensation in a composite micro-accelerometer
Author(s): Gary X. Li; Ron J. Gutteridge; Dan N. Koury; Zhenjun Zhang; Ray M. Roop
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Micromachined vibrating gyroscopes
Author(s): Jan Soderkvist
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Micromachined rotating yaw-rate sensor
Author(s): Robert B. Yates; Connel B. Williams; Chris Shearwood; Phillip Mellor
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Microsystem CAD
Author(s): Jan G. Korvink; Henry Baltes
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Performance trade-offs for a surface micromachined microengine
Author(s): Samuel L. Miller; Jeffry J. Sniegowski; Glen LaVigne; Paul J. McWhorter
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Novel MEMS simulation tool for thermal-based radiation sensors
Author(s): Nicholas R. Swart; Hubert Jerominek; Philippe Lambert
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Mercury-contact switching with gap-closing microcantilever
Author(s): Scott Saffer; Jonathan Simon; Chang-Jin Kim; Kyung Ho Park; Jong-Hyun Lee
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Design considerations of the electrical contacts in (micro)relays
Author(s): Hocine Ziad; Christiaan Baert; Harrie A. C. Tilmans
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Development and fabrication of a rotary micropump and its industrial and medical applications
Author(s): Thomas Weisener; Gerald Voegele; Mark Widmann; Carlo Bark; Rolf Dieter Schraft; Axel Bertholds; Andreas Braunschweiler
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Development and manufacturing of a two-dimensional microactuator for moving an optical fiber
Author(s): Thomas Frank
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Thermoelectric CMOS anemometers
Author(s): Felix Mayer; Marcel Hintermann; Heiko Jacobs; Oliver Paul; Henry Baltes
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Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media
Author(s): Gordon Bitko; David J. Monk; Theresa Maudie; Dennis Stanerson; John Wertz; Jeanene Matkin; Slobodan Petrovic
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Planar surface-micromachined pressure sensor with a subsurface, embedded reference pressure cavity
Author(s): William P. Eaton; James H. Smith
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Phase-sensitive techniques applied to a micromachined vacuum sensor
Author(s): Glenn H. Chapman; N. Sawadsky; P. P. S. Juneja
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Strain sensitive resonant gate transistor
Author(s): Shun-ichi Miyazaki; Takashi Yoshida; Kyoichi Ikeda
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Semiconductor acceleration sensor
Author(s): Katsumichi Ueyanagi; Mitsuo Kobayashi; Tomoaki Goto
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Force measurements of polysilicon thermal microactuators
Author(s): J. Robert Reid; Victor M. Bright; John H. Comtois
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Industrial microsystems on top of CMOS design and process
Author(s): Jordi Carrabina; Joaquin Saiz; David Marin; Xavier Marin; Angel Merlos; Joan Bausells
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Innovative frequency measurement technique used in the design of a single channel frequency to digital converter ASIC
Author(s): Neranjen Ramalingam; Vijay K. Varadan; Vasundara V. Varadan
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Numerical analysis of an optical motor based on the radiation pressure
Author(s): Yoshiro Ohmachi; Kazuhiro Baba; Eiji Higurashi
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Application of micromachining technology to optical devices and systems
Author(s): Hiroyuki Fujita
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Commercializing MEMS--too fast or too slow?
Author(s): S. Walsh; W. N. Carr; H. Mados; D. S. Narang
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