### PROCEEDINGS VOLUME 2522

Electron-Beam Sources and Charged-Particle Optics*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 2522

Date Published: 25 September 1995

Date Published: 25 September 1995

Table of Contents

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Electron-beam microcolumn technology and applications

Author(s): T.H. Philip Chang; Michael G.R. Thomson; M. L. Yu; Ernst Kratschmer; H. S. Kim; Kim Y. Lee; Stephen A. Rishton; Dieter P. Kern

Author(s): T.H. Philip Chang; Michael G.R. Thomson; M. L. Yu; Ernst Kratschmer; H. S. Kim; Kim Y. Lee; Stephen A. Rishton; Dieter P. Kern

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Electron-optical design for the SCALPEL proof-of-concept tool

Author(s): Warren K. Waskiewicz; Steven D. Berger; Lloyd R. Harriott; Masis M. Mkrtchyan; Stephen W. Bowler; J. M. Gibson

Author(s): Warren K. Waskiewicz; Steven D. Berger; Lloyd R. Harriott; Masis M. Mkrtchyan; Stephen W. Bowler; J. M. Gibson

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Large-field electron optics: limitations and enhancements

Author(s): Hans C. Pfeiffer; Werner Stickel

Author(s): Hans C. Pfeiffer; Werner Stickel

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Thermal field emission sources and optics for Gaussian electron-beam lithography

Author(s): Tom Chisholm; Bernard A. Wallman; Johannes C. Romijn

Author(s): Tom Chisholm; Bernard A. Wallman; Johannes C. Romijn

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Aberration analysis of wide-angle deflectors and lenses by direct ray-tracing and comparison with conventional aberration theories

Author(s): Eric Munro; Xieqing Zhu; John A. Rouse; Haoning Liu

Author(s): Eric Munro; Xieqing Zhu; John A. Rouse; Haoning Liu

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Dynamic correction of aberrations in focusing and deflection systems with shaped beams

Author(s): Xieqing Zhu; Haoning Liu; Eric Munro

Author(s): Xieqing Zhu; Haoning Liu; Eric Munro

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Rigorous theoretical investigation of distortion in ion-projection noncathode systems

Author(s): Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat

Author(s): Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat

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Some problems of mathematical simulation in optimization design of electrostatic image tubes

Author(s): LiWei Zhou; Zhiquan Zhang; Weiqi Jin; Erlun Fang; GuoQiang Ni; Liangzhong Zhang

Author(s): LiWei Zhou; Zhiquan Zhang; Weiqi Jin; Erlun Fang; GuoQiang Ni; Liangzhong Zhang

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Simulation software BEAMISH for the design of charged-particle optical instruments

Author(s): Yoshihiro Ueno; Masahiro Takebe; Akihiko Iwata; Sumio Kumashiro

Author(s): Yoshihiro Ueno; Masahiro Takebe; Akihiko Iwata; Sumio Kumashiro

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Improvements to the electrostatic lens optimization method SOEM

Author(s): Jim Edmond Barth; H. W. G. van der Steen; Jaroslav Chmelik

Author(s): Jim Edmond Barth; H. W. G. van der Steen; Jaroslav Chmelik

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Primary expert system applied in design of electron-optical system

Author(s): Wei Lei; Linsu Tong

Author(s): Wei Lei; Linsu Tong

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Theory of group applied to calculate field of multielectrode systems with symmetrical geometry of electrodes

Author(s): Igor Felixovich Spivak-Lavrov

Author(s): Igor Felixovich Spivak-Lavrov

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New design for a field emission electron gun immersed in a magnetic lens field

Author(s): Kenichi Saito; Hirofumi Morita; Nobuo Shimazu; Yasumichi Uno

Author(s): Kenichi Saito; Hirofumi Morita; Nobuo Shimazu; Yasumichi Uno

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Comparative study of supertips for electron field emitters

Author(s): Hans W. P. Koops; Mark A. Weber; J. Urban; C. Schoessler

Author(s): Hans W. P. Koops; Mark A. Weber; J. Urban; C. Schoessler

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New MV-class generator

Author(s): Kiyotaka Ishibashi; Ken-ichi Inoue; Chikara Ichihara; Yukito Furukawa; Kazushi Yokoyama; Hirofumi Fukuyama

Author(s): Kiyotaka Ishibashi; Ken-ichi Inoue; Chikara Ichihara; Yukito Furukawa; Kazushi Yokoyama; Hirofumi Fukuyama

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Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode

Author(s): Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi

Author(s): Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi

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Immersion lenses for low-voltage SEM and LEEM

Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto

Author(s): Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto

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Optimized secondary electron collection in in-lens-type objective lens

Author(s): Katsuhiro Kuroda; Atsuko Takafuji; Ken-ichi Yamamoto; Mitsugu Satou

Author(s): Katsuhiro Kuroda; Atsuko Takafuji; Ken-ichi Yamamoto; Mitsugu Satou

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Electrostatic lenses with corrected chromatic and spherical aberrations

Author(s): Lubov A. Baranova; Stella Y. Yavor; Eric Munro

Author(s): Lubov A. Baranova; Stella Y. Yavor; Eric Munro

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Pulsed magnetic quadrupole lenses

Author(s): Hermann Wollnik; Markus Winkler; E. I. Esch; G. Li; P. Spiller; D. H. H. Hoffman

Author(s): Hermann Wollnik; Markus Winkler; E. I. Esch; G. Li; P. Spiller; D. H. H. Hoffman

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Improvement of sensitivity and depth resolution in conventional RBS and ERDA techniques using energy/momentum filters

Author(s): Kiyotaka Ishibashi; Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Bijoy K. Patnaik; Nalin R. Parikh

Author(s): Kiyotaka Ishibashi; Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Bijoy K. Patnaik; Nalin R. Parikh

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Curvature of the effective field boundary of realistic sector magnets

Author(s): B. Pfreundtner; Hermann Wollnik

Author(s): B. Pfreundtner; Hermann Wollnik

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Split shielding plates in electrostatic sector analyzers and Wien filters

Author(s): Mikhail Igorevitch Yavor

Author(s): Mikhail Igorevitch Yavor

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Solution of electron optics problems with space charge in 2D and 3D

Author(s): John A. Rouse; Xieqing Zhu; Eric Munro

Author(s): John A. Rouse; Xieqing Zhu; Eric Munro

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Saturated electron lens design using a second-order finite element method

Author(s): John Hodkinson; Khadija Tahir

Author(s): John Hodkinson; Khadija Tahir

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Retarding field optics with field-free sample

Author(s): Laurence S. Hordon; B. B. Boyer; Roger Fabian W. Pease

Author(s): Laurence S. Hordon; B. B. Boyer; Roger Fabian W. Pease

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SEIII electrons in the scanning electron microscope: their production, detection, and effect on image quality

Author(s): Maya Balasubramanyam; Eric Munro

Author(s): Maya Balasubramanyam; Eric Munro

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Fringe-field-induced 12-pole component of magnetic quadrupole lenses

Author(s): B. Pfreundtner; Hermann Wollnik

Author(s): B. Pfreundtner; Hermann Wollnik

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Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system

Author(s): Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama

Author(s): Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama

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Use of two focusing modes on two-lens focused ion-beam column

Author(s): Tohru Ishitani; Y. Kawanami

Author(s): Tohru Ishitani; Y. Kawanami

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Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations

Author(s): Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott

Author(s): Masis M. Mkrtchyan; Steven D. Berger; James Alexander Liddle; Lloyd R. Harriott

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Calculation of aberrations of a space charge lens and its possible applications

Author(s): Li Wang; Tiantong Tang; Jon Orloff

Author(s): Li Wang; Tiantong Tang; Jon Orloff

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Low-energy focused ion-beam system for direct deposition

Author(s): Masahiro Ueda; Shinji Nagamachi; Yasuhiro Yamakage; Hiromasa Maruno; Junzo Ishikawa

Author(s): Masahiro Ueda; Shinji Nagamachi; Yasuhiro Yamakage; Hiromasa Maruno; Junzo Ishikawa

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Low-energy focused ion-beam system combined with molecular-beam epitaxy system for fabrication of 3D buried semiconductor structures

Author(s): Junichi Yanagisawa; Kuniyoshi Kito; Kentaro Monden; Kenji Gamo

Author(s): Junichi Yanagisawa; Kuniyoshi Kito; Kentaro Monden; Kenji Gamo

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Compensation for rapid contrast variations and correction for charging effects in scanning ion microscopy

Author(s): Sam T. Davies

Author(s): Sam T. Davies

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Subcompact free-electron laser

Author(s): John Wesley Lewellen IV; John F. Schmerge; Richard H. Pantell; Joseph Feinstein

Author(s): John Wesley Lewellen IV; John F. Schmerge; Richard H. Pantell; Joseph Feinstein

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Design and operation of the Compact Infrared Free-Electron Laser (CIRFEL)

Author(s): Ira S. Lehrman; Jayaram Krishnaswamy; Richard A. Hartley; Michael F. Reusch; Alan M. M. Todd; Robert H. Austin; D. Feldman

Author(s): Ira S. Lehrman; Jayaram Krishnaswamy; Richard A. Hartley; Michael F. Reusch; Alan M. M. Todd; Robert H. Austin; D. Feldman

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Radiation produced by relativistic electrons moving over a diffraction grating

Author(s): John E. Walsh; Kenneth Woods; Richard Fernow; Harold Kirk

Author(s): John E. Walsh; Kenneth Woods; Richard Fernow; Harold Kirk

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Picosecond pump-probe using an FEL and synchrotron source

Author(s): Karl David Straub; John M. J. Madey; Patrick G. O'Shea; Vladimir N. Litvinenko; Eric B. Szarmes; Genevieve A. Barnett

Author(s): Karl David Straub; John M. J. Madey; Patrick G. O'Shea; Vladimir N. Litvinenko; Eric B. Szarmes; Genevieve A. Barnett

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Short-wavelength light sources at Duke storage ring

Author(s): Vladimir N. Litvinenko; Genevieve A. Barnett; Bentley Burnham; N. Hower; Leon Johnson; John M. J. Madey; Ying Wu

Author(s): Vladimir N. Litvinenko; Genevieve A. Barnett; Bentley Burnham; N. Hower; Leon Johnson; John M. J. Madey; Ying Wu

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NSLS source development laboratory

Author(s): Ilan Ben-Zvi; Eric Blum; Erik D. Johnson; Samuel Krinsky; James B. Murphy; Li-Hua Yu

Author(s): Ilan Ben-Zvi; Eric Blum; Erik D. Johnson; Samuel Krinsky; James B. Murphy; Li-Hua Yu

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Self-consistent undulator radiation via Lienard-Wiechert fields

Author(s): Luis R. Elias; Musit Tecimer; Isidoro Kimel

Author(s): Luis R. Elias; Musit Tecimer; Isidoro Kimel

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Design and application of coaxial wigglers in free-electron lasers

Author(s): Robert H. Jackson; Monica Blank; Henry P. Freund; Dean E. Pershing; J. M. Taccetti

Author(s): Robert H. Jackson; Monica Blank; Henry P. Freund; Dean E. Pershing; J. M. Taccetti

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Microwave measurements and beam dynamics simulations of the BNL/SLAC/UCLA emittance-compensated 1.6-cell photocathode rf gun

Author(s): Dennis T. Palmer; Roger H. Miller; Herman Winick; Xi Jie Wang; Kenneth Batchelor; Martin H. Woodle; Ilan Ben-Zvi

Author(s): Dennis T. Palmer; Roger H. Miller; Herman Winick; Xi Jie Wang; Kenneth Batchelor; Martin H. Woodle; Ilan Ben-Zvi

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Micromachined electron gun array (MEGA)

Author(s): Noel C. MacDonald; Wolfgang Hofmann; Liang-Yuh Chen; John H. Das

Author(s): Noel C. MacDonald; Wolfgang Hofmann; Liang-Yuh Chen; John H. Das

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Realizing any specified image rotation in electrostatic and magnetic imaging

Author(s): Weiqi Jin; LiWei Zhou; GuoQiang Ni

Author(s): Weiqi Jin; LiWei Zhou; GuoQiang Ni

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Simulation of electron-optical system in color monitor tube

Author(s): Wei Lei; Linsu Tong

Author(s): Wei Lei; Linsu Tong

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Numerical techniques and software for static and dynamic image tubes design

Author(s): Mikhail A. Monastyrski; Sergei V. Andreev; Valentina P. Degtyareva; Marina Vyacheslav Korneeva; Yu. V. Kulikov; Alexander M. Prokhorov; Victor A. Tarasov; Mikhail Ya. Schelev

Author(s): Mikhail A. Monastyrski; Sergei V. Andreev; Valentina P. Degtyareva; Marina Vyacheslav Korneeva; Yu. V. Kulikov; Alexander M. Prokhorov; Victor A. Tarasov; Mikhail Ya. Schelev

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Transfer matrix of a narrow gap between two quadrupole lenses

Author(s): Mikhail Igorevitch Yavor; O. A. Grineva

Author(s): Mikhail Igorevitch Yavor; O. A. Grineva

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Global space charge effects in ion-beam lithography

Author(s): John J. Petillo; Alfred A. Mondelli

Author(s): John J. Petillo; Alfred A. Mondelli

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