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Interferometry: Surface Characterization and Testing

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Volume Details

Volume Number: 1776
Date Published: 15 December 1992

Table of Contents
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Effects of thin films on interferometric step height measurements
Author(s): Thomas H. McWaid; Theodore V. Vorburger; Jun-Feng Song; Deane Chandler-Horowitz
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Development of optical surface-profiling instrumentation
Author(s): Yao Lin; Peter Z. Takacs; Thomas Tsang; Karen Furenlid; Runwen Wang
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Rapid surface roughness measurements of coarse objects
Author(s): John N. Pike
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Surface defect analysis of semiconductor materials and devices using nanoscopy techniques
Author(s): Denis Montaner; Paul C. Montgomery; Eric Andre
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Moire based optical surface profiler for the minting industry
Author(s): Bozenko F. Oreb; Kieran G. Larkin; Philip S. Fairman; M. Ghaffari
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Comparison of wavefront-sensor techniques
Author(s): Joseph M. Geary; K. Marty Yoo; Pamela S. Davila; Allan Wirth; Andrew J. Jankevics; Mitchell C. Ruda; Robert J. Zielinski; Lawrence J. Petrilli
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Absolute testing of flats decomposed to even and odd functions
Author(s): Chiayu Ai; James C. Wyant
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ISO figure specification (ISO-10110-5) and digital interferometry
Author(s): Lars A. Selberg; Bruce E. Truax
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Absolute testing of flats using four data sets
Author(s): Lianzhen Shao; Robert E. Parks; Chiayu Ai
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Retrace error: a case study
Author(s): Joseph M. Geary; K. Marty Yoo; Guojun Si
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Theory and practice of a fringe-counting thickness-uniformity test device for IR flats, domes, and conformal windows
Author(s): Daniel D. Barber; David J. Erickson
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Systematic errors of a projection-moire contouring system
Author(s): Andrew H. Fagg; Bryan S. Hales; H. Philip Stahl
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Automated alignment system for aspheric mirrors
Author(s): L. Curt Maxey; William B. Dress; JoEllen Rogers; Kenneth W. Tobin Jr.
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Decenter and defocus for testing aspheric surfaces
Author(s): Der-Shen Wan
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Limitations of phase-measuring interferometry for surface characterization and testing: a review
Author(s): Eugene R. Cochran III
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Device working on the light principle for surface-roughness measurement
Author(s): Josef Mandak
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New heterodyne interferometer for measuring surface topography
Author(s): Huijie Zhao; Xifu Qiang; Pengsheng Li; Hua Li
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Mathematical modeling of amplitude-phase measuring system for a precision surface-roughness registration
Author(s): Yury Snezhko
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