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Vibration Control in Microelectronics, Optics, and Metrology
Editor(s): Colin G. Gordon

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 1619
Date Published: 1 February 1992

Table of Contents
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Matching performance requirements with technology: an applications approach to vibration isolation
Author(s): Thomas A. Cellucci
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Improved vibration isolation system for a scanning electron microscope
Author(s): Peter A. Jennings; John W. Willson; Roy H. Bannister
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Recent advancements in passive and active vibration control systems
Author(s): K. Peter Heiland
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Secondary mirror chopping system for large infrared telescope
Author(s): Tetsu Yamamoto; Takaharu Ueda; Daisuke Ogata; Shigeki Mizuno
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Negative-stiffness-mechanism vibration isolation systems
Author(s): David L. Platus
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Evaluation of acceptable levels and standards of vibration in relation to large telescopes and observatories
Author(s): Brian H. Thomas; Duncan C. McKellar; Margaret Melbourne
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Factors in the design and selection of vibration-sensitive equipment
Author(s): Norman Owen; Reuben Hale
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Generic criteria for vibration-sensitive equipment
Author(s): Colin G. Gordon
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Protecting vibration environments with zoning and land-use ordinances
Author(s): Ramon E. Nugent; Hal Amick
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Influence of bases and benches on the performance of vibration-sensitive equipment
Author(s): Colin G. Gordon; Yung Q. Tran
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New kind of scanning device of low mechanical vibration noises in confocal scanning optical microscope
Author(s): Zhang Shen; ChunKan Tao
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Using wavelength change as a depth scanner to overcome the mechanical vibration in confocal scanning optical microscope
Author(s): Zhang Shen; ChunKan Tao; Xiaoliang Fu
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Vibration considerations in the design of the Advanced Photon Source at Argonne National Laboratory
Author(s): Joseph A. Jendrzejczyk; Martin W. Wambsganss
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Influence of foundation design on environmental vibration
Author(s): James Truman Nelson; Warren E. Blazier Jr.
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Stability and vibration control in synchrotron light source buildings
Author(s): Jules B. Godel
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Site selection and design of a low-vibration building for submicron technology applications
Author(s): Alain Brochet; Jean Bernard
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Design for vibration control in microelectronics facilities
Author(s): Roger Anderson
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Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology
Author(s): Westwood K. W. Hong; Nicholas Boulter
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Design of stiff, low-vibration floor structures
Author(s): Hal Amick; Steven G. Hardash; Paul E. Gillett; Ronald J. Reaveley
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Effect of a viscoelastic admixture on transient vibration in a concrete and steel floor
Author(s): Neil Moiseev
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Vibration control and isolation design for the Electrical Engineering/Computer Science Building, University of Minnesota--Minneapolis, Minnesota
Author(s): David L. Pederson
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Site selection considerations for scanning and transmission electron microscopes
Author(s): Wayne Vogen
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Controlling horizontal microscale vibration in building floor entablatures
Author(s): Frank J. Hubach
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Study of ground effects on building foundation vibration using two-dimensional real-mode finite element analysis
Author(s): William B. Rockwood
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Quantification of structural vibration and development of criteria: an introduction to IES draft standard RP-24
Author(s): Stephen R. W. Neal
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Review of several methods for processing vibration data
Author(s): Hal Amick; Sean K. Bui
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Accurate characterization of low-level vibration environments using seismological sensors and systems
Author(s): Robert L. Nigbor
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Vibration measurement techniques for advanced test and manufacturing facilities
Author(s): Randy O. Goucher; Dennis Smith
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Remote recording of small vibrations of objects by a double-mode gas laser
Author(s): Victor N. Petrovsky; Michael L. Anishenko; Evgeniy D. Protsenko; Nickolay Naumov
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Dynamic holographic vibrometry on photorefractive media
Author(s): George Eugene Dovgalenko; Vladimir M. Eskov-Soskovetz
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Effective and well-proven condition monitoring system using portable and permanently installed instrumentation
Author(s): Brian H. Thomas; Duncan C. McKellar; Margaret Melbourne
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Monitoring vibrations in microelectronics facilities
Author(s): John J. O'Sullivan
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Microvibration monitoring: some recent experiences in an operating microelectronics facility
Author(s): Kevin Hassett
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Continuous vibration monitoring system at an operating microelectronics fabrication plant
Author(s): Goutam Paul; Rajesh Mehta
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PC-based trending and analysis of floor vibration in sensitive fabrication areas
Author(s): Jon E. Palm; Ben Middleton
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Achieving microradian accuracy with silicon position-sensitive detectors
Author(s): Richard J. Gaughan
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Method to overcome the random factors in arranging a coherent bundle of optic fiber
Author(s): Zhang Shen
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