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Multilayer Optics for Advanced X-Ray Applications
Editor(s): Natale M. Ceglio

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 1547
Date Published: 1 January 1992

Table of Contents
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High-performance multilayer mirrors for soft x-ray projection lithography
Author(s): Daniel Gorman Stearns; Robert S. Rosen; Stephen P. Vernon
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Fabrication of advanced x-ray optics with magnetron minisource arrays
Author(s): Alan F. Jankowski; R. J. Foreman; Daniel M. Makowiecki
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Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics
Author(s): Pierre Boher; Philippe Houdy; Louis Hennet; Mikhael Kuehne; Peter Mueller; J. P. Frontier; P. Trouslard; C. Senillou; J. C. Joud; P. Ruterana
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Multilayer coatings on figured optics
Author(s): Stephen P. Vernon; Daniel Gorman Stearns; Robert S. Rosen; Natale M. Ceglio; David P. Gaines; Michael K. Krumrey; Peter Mueller
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Low-Z1/low-Z2 multilayer x-ray optical thin films
Author(s): Peter J. Biltoft; Ralph F. Pombo
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Boron-based multilayers for soft x-ray optics
Author(s): Patrick A. Kearney; Jon M. Slaughter; Charles M. Falco
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Characterization of Pd-B, Ag-B, and Si-B interfaces
Author(s): Jon M. Slaughter; Patrick A. Kearney; Charles M. Falco
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Soft x-ray projection lithography system design and cost analysis
Author(s): Natale M. Ceglio; Andrew M. Hawryluk
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Reflection masks for soft x-ray projection lithography
Author(s): Andrew M. Hawryluk; Natale M. Ceglio; D. W. Phillion; David P. Gaines; Raymond Browning; Roger Fabian W. Pease; Diane K. Stewart; Nicholas P. Economou
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Differential equation method for design of multimirror x-ray projection lithography systems
Author(s): Cheng Wang; David L. Shealy
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Multilayer mirrors for XUV Ge laser wavelengths
Author(s): Claude Montcalm; Brian Thomas Sullivan; Henri Pepin; Jerzy A. Dobrowolski; G. D. Enright
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Precision soft x-ray reflectometry of curved multilayer optics
Author(s): Michael K. Krumrey; Mikhael Kuehne; Peter Mueller; Frank Scholze
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Soft x-ray reflectometry of multilayer coatings using a laser-plasma source
Author(s): David L. Windt; Warren K. Waskiewicz
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Annealing studies of Ru/Si multilayer by high-angle annular dark-field microscopy and HREM
Author(s): Yuanda Cheng; J. Liu; M. B. Stearns; Daniel Gorman Stearns
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Fabrication and characterization of beryllium-based multilayer mirrors for soft x-rays
Author(s): Judith A. Ruffner; Jon M. Slaughter; Patrick A. Kearney; Charles M. Falco
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Structural changes induced by thermal annealing in W/C multilayers
Author(s): Benjamin S. Chao; Jesus Gonzalez-Hernandez; D. A. Pawlik; Stanford R. Ovshinsky; James Scholhamer; James L. Wood; Kevin Parker
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Thermal stability of Mo/Si multilayers
Author(s): Robert S. Rosen; Michael A. Viliardos; M. E. Kassner; Daniel Gorman Stearns; Stephen P. Vernon
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Two methods to improve the optical quality of Ni-C multilayer coatings: ion bombardment and optimization of the substrate temperature
Author(s): Eric J. Puik; S. W.M. van de Ven; W. J. Wolfis; Gert E. van Dorssen; Marnix J. van der Wiel; R. J.I.M. Koper; H. Zeijlemaker; Jan Verhoeven
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Repair of high-performance multilayer coatings
Author(s): David P. Gaines; Natale M. Ceglio; Stephen P. Vernon; Michael K. Krumrey; Peter Mueller
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Upgraded facility for multilayer mirror characterization at NIST
Author(s): Richard N. Watts; David L. Ederer; Richard D. Deslattes Jr.; Thomas B. Lucatorto; William Tyler Estler; Christopher J. Evans; Theodore V. Vorburger
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Simulation of the growth of Mo/Si multilayers
Author(s): David B. Boercker; W. Lowell Morgan
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Experimental study of Fe/C multilayer performance: effects of substrate quality and of x-ray irradiation
Author(s): Eric Ziegler; M. Krisch; L. Vasquez; Jean Susini; Pierre Boher; Philippe Houdy
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