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Laser/Optical Processing of Electronic Materials
Editor(s): Jagdish Narayan

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 1190
Date Published: 23 February 1990

Table of Contents
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Excimer Laser-Assisted Deposition And Etching Of II-VI Materials
Author(s): G. L. Olson; P. D. Brewer; J. J. Zinck; J. E. Jensen; L. W. Tutt
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Adsorption And Photodissociation Studies Of Tetramethyltin On CdTe(100)
Author(s): Hartmut Hochst; Mike A. Engelhardt
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Ar Ion Laser-Assisted Metal-Organic Vapor Phase Epitaxy Of ZnSe
Author(s): A. Yoshikawa; T. Okamoto; T. Fujimoto; K. Onoue; K. Haseyama; S. Yamaga; H. Kasai
Show Abstract
Laser Induced Surface Chemical Epitaxy
Author(s): C. D. Stinespring; A. Freedman
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Selective Laser Epitaxy Of GaAs On GaAs Substrates
Author(s): N. A. El-Masry; S. A. Hussien
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Resistless Microfabrication Of Cu Thin Films On N-Type GaAs By Projection Patterned Excimer Laser Doping
Author(s): Koji Sugioka; Koichi Toyoda
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Deep Level Defects In Ion Implanted Laser Annealed Bulk GaAs
Author(s): Mqhele E. Dlodlo; Andrzej Rys; Akhter U. Ahmed; James H. Edgar
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Critical Current Density Measurements In High Tc "Insitu" YBa2Cu3O7-8 Superconducting Thin Films
Author(s): C. B. Lee; R. K. Singh; P. Tiwari; J. Narayan
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Laser Plasma Production Of Amorphic Diamond Films
Author(s): C. B. Collins; F. Davanloo; E. M. Juengerman; D. R. Jander; T. J. Lee
Show Abstract
Laser Atomic Cleaning And Initial Stages Of Epitaxial Growth Of Germanium Films On (100) Silicon During Laser Physical Vapor Deposition
Author(s): N. Biunno; S. Sharan; J. Narayan
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X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation
Author(s): Fumio Kokai; Hideaki Saito; Tomoo Fujioka
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Wavelength Dependence Of Boron Doping In Silicon Photochemical Vapor Deposition
Author(s): Satoru Watanabe; Tatsuya Yamazaki; Takashi Ito
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Laser And Plasma Enhanced Deposition Of Diamond And Diamondlike Films By Physical And Chemical Vapor Deposition Techniques
Author(s): J. Krishnaswamy; A. Rengan; A. R. Srivatsa; G. Matera; J. Narayan
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Low Temperature Processing of TiN Epitaxial and Polycrystalline Films by Laser Physical Vapor Deposition
Author(s): N. Biunno; J. Narayan; A. R. Srivatsa
Show Abstract
Microstructural Studies Of Laser Enhanced, Filament Assisted Deposition Of Diamond Films
Author(s): A. Rengan; J. Krishnaswamy; G. Matera; A. R. Srivatsa; J. Narayan
Show Abstract
Resistless Pattern Etching of SiC by Excimer Laser
Author(s): Masataka Murahara
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Point Defects Induced In Silicon During Excimer Laser Doping In BCl3 and PCl3 Atmosphere
Author(s): G. G. Bentini; M. Bianconi; L. Correra; R. Fabbri; R. Nipoti; S. Nicoletti
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Mechanisms Of Contamination In Photochemical Deposition Or Thin Metal Films
Author(s): K. A. Singmaster; F. A. Houle; R. J. Wilson
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Formation And Modification Of Surface Alloys By Excimer Laser Melting And Resolidification
Author(s): T. R. Jervis; M. Nastasi; J-P. Hirvonen
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Rapid Isothermal Processing (RIP) Of Advanced Electronic Materials
Author(s): R. Singh
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Laser-Induced Chemical Vapor Deposition of High-Purity Metals
Author(s): Thomas H. Baum
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Laser Writing Metal Interconnects To Existing IC Metallization
Author(s): Robert R. Krchnavek; Joshua Alspector; Daniel F. Daly; Susan Degidio
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An Excimer Laser-Based Aluminum Planarization Process
Author(s): S. Chen; E. Ong
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