### PROCEEDINGS VOLUME 11057

Modeling Aspects in Optical Metrology VII
Volume Details

Volume Number: 11057

Date Published: 22 August 2019

Date Published: 22 August 2019

Table of Contents

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Front Matter: Volume 11057

Author(s): Proceedings of SPIE

Author(s): Proceedings of SPIE

Numerical optimization of resonant photonic devices (Conference Presentation)

Author(s): Martin Hammerschmidt; Lin Zschiedrich; Philipp-Immanuel Schneider; Felix Binkowski; Sven Burger

Author(s): Martin Hammerschmidt; Lin Zschiedrich; Philipp-Immanuel Schneider; Felix Binkowski; Sven Burger

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Lensless metrology for semiconductor lithography at EUV

Author(s): Iacopo Mochi; Dimitrios Kazazis; Li-Ting Tseng; Sara Fernandez; Rajendran Rajeev; Uldis Locans; Atoosa Dejkameh; Ricarda Nebling; Ekinci Yasin

Author(s): Iacopo Mochi; Dimitrios Kazazis; Li-Ting Tseng; Sara Fernandez; Rajendran Rajeev; Uldis Locans; Atoosa Dejkameh; Ricarda Nebling; Ekinci Yasin

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Response of rotational shearing interferometer to a planetary system with two planets: simulation

Author(s): M. Strojnik; B. Bravo-Medina

Author(s): M. Strojnik; B. Bravo-Medina

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Fractional Fourier ridges for demodulation of interferograms with quadratic phase

Author(s): Jin-Min Wu; Ming-Feng Lu; Chen-Chen Ji; Pei-Hang Li; Feng Zhang; Ran Tao

Author(s): Jin-Min Wu; Ming-Feng Lu; Chen-Chen Ji; Pei-Hang Li; Feng Zhang; Ran Tao

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Suppression of nonlinear optical frequency sweeping in frequency-scanning interferometry for absolute distance measurement

Author(s): Zhongwen Deng; Zhigang Liu; Xingyu Jia; Wen Deng

Author(s): Zhongwen Deng; Zhigang Liu; Xingyu Jia; Wen Deng

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Intrinsic surface feature based subaperture stitching of freeform wavefront

Author(s): Kamal K. Pant; Dali R. Burada; Vinod Mishra; L. M. Pant; Amitava Ghosh; Gufran S. Khan; Stefan Sinzinger; Chandra Shakher

Author(s): Kamal K. Pant; Dali R. Burada; Vinod Mishra; L. M. Pant; Amitava Ghosh; Gufran S. Khan; Stefan Sinzinger; Chandra Shakher

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Modeling aspects for high precision absorption measurements

Author(s): Walter Dickmann; Johannes Dickmann; Florian F. Bruns; Stefanie Kroker

Author(s): Walter Dickmann; Johannes Dickmann; Florian F. Bruns; Stefanie Kroker

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Large area metasurface lenses in the NIR region

Author(s): Mitchell Kenney; James Grant; Danni Hao; Kevin Docherty; Gordon Mills; Graham Jeffrey; Donald Macleod; David Henry; Peter MacKay; Marc Sorel; Robert A. Lamb; David R. S. Cumming

Author(s): Mitchell Kenney; James Grant; Danni Hao; Kevin Docherty; Gordon Mills; Graham Jeffrey; Donald Macleod; David Henry; Peter MacKay; Marc Sorel; Robert A. Lamb; David R. S. Cumming

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Systematic approach on illustrating the challenges represented by optical bidirectional measurements using rigorous simulations

Author(s): Jan Krüger; Rainer Köning; Bernd Bodermann

Author(s): Jan Krüger; Rainer Köning; Bernd Bodermann

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Model-based confocal fluorescence microscopy measurements of submerged micro geometries

Author(s): Merlin Mikulewitsch; Axel v. Freyberg; Dirk Stöbener; Andreas Fischer

Author(s): Merlin Mikulewitsch; Axel v. Freyberg; Dirk Stöbener; Andreas Fischer

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Model based laser focus scanning: the path towards improved lateral accuracy

Author(s): Jörg Bischoff; Rostyslaw Mastylo; Gerard Granet; Eberhard Manske

Author(s): Jörg Bischoff; Rostyslaw Mastylo; Gerard Granet; Eberhard Manske

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Characterization of the topography fidelity of 3D optical microscopy

Author(s): S. Gao; A. Felgner; D. Hüser; L. Koenders

Author(s): S. Gao; A. Felgner; D. Hüser; L. Koenders

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Simulation of 3D laser scanning with phase-based EDM for the prediction of systematic deviations

Author(s): Sukant Chaudhry; David Salido-Monzú; Andreas Wieser

Author(s): Sukant Chaudhry; David Salido-Monzú; Andreas Wieser

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Design of a null-screen for a compact corneal topographer

Author(s): Manuel Campos-García; Daniel Aguirre-Aguirre; José Antonio Lechuga-Núñez; Andrés Peña-Conzuelo

Author(s): Manuel Campos-García; Daniel Aguirre-Aguirre; José Antonio Lechuga-Núñez; Andrés Peña-Conzuelo

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Efficient global sensitivity analysis for silicon line gratings using polynomial chaos

Author(s): Nando Farchmin; Martin Hammerschmidt; Philipp-Immanuel Schneider; Matthias Wurm; Bernd Bodermann; Markus Bär; Sebastian Heidenreich

Author(s): Nando Farchmin; Martin Hammerschmidt; Philipp-Immanuel Schneider; Matthias Wurm; Bernd Bodermann; Markus Bär; Sebastian Heidenreich

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Supplementing rigorous electromagnetic modeling with atomistic simulations for optics-based metrology

Author(s): Bryan M. Barnes; Hui Zhou; Richard M. Silver; Mark-Alexander Henn

Author(s): Bryan M. Barnes; Hui Zhou; Richard M. Silver; Mark-Alexander Henn

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Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction

Author(s): Anna Andrle; Philipp Hönicke; Philipp Schneider; Yves Kayser; Martin Hammerschmidt; Sven Burger; Frank Scholze; Burkhard Beckhoff; Victor Soltwisch

Author(s): Anna Andrle; Philipp Hönicke; Philipp Schneider; Yves Kayser; Martin Hammerschmidt; Sven Burger; Frank Scholze; Burkhard Beckhoff; Victor Soltwisch

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Accurate and robust characterization of volume scattering materials using the intensity-based inverse adding-doubling method

Author(s): António Correia; Peter Hanselaer; Youri Meuret

Author(s): António Correia; Peter Hanselaer; Youri Meuret

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Tomographic Mueller-matrix scatterometry for nanostructure metrology: principle and opportunities (Conference Presentation)

Author(s): Xiuguo Chen; Shiyuan Liu

Author(s): Xiuguo Chen; Shiyuan Liu

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Polarization metrology for high numerical aperture DUV objectives

Author(s): Robert D. Grejda; Paul F. Michaloski; Duncan C. Spaulding; Stephen K. Mack; Robert L. Michaels; Paul G. Dewa; David L. Aronstein

Author(s): Robert D. Grejda; Paul F. Michaloski; Duncan C. Spaulding; Stephen K. Mack; Robert L. Michaels; Paul G. Dewa; David L. Aronstein

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Vectorial modeling for the image formation of a high-numerical-aperture Mueller-matrix ellipsometer

Author(s): Cai Wang; Chao Chen; Xiuguo Chen; Shiyuan Liu

Author(s): Cai Wang; Chao Chen; Xiuguo Chen; Shiyuan Liu

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Mueller matrix ellipsometry for enhanced optical form metrology of sub-lambda structures

Author(s): Tim Käseberg; Johannes Dickmann; Thomas Siefke; Matthias Wurm; Stefanie Kroker; Bernd Bodermann

Author(s): Tim Käseberg; Johannes Dickmann; Thomas Siefke; Matthias Wurm; Stefanie Kroker; Bernd Bodermann

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An improved method to derive best-fit parameters and their uncertainties from depolarizing Mueller-matrices (Conference Presentation)

Author(s): Tobias Grunewald; Matthias Wurm; Sven Teichert; Bernd Bodermann; Johanna Reck; Uwe Richter

Author(s): Tobias Grunewald; Matthias Wurm; Sven Teichert; Bernd Bodermann; Johanna Reck; Uwe Richter

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Fast compressed channeled spectropolarimeter for full Stokes vector measurement

Author(s): Guodong Zhou; Yanqiu Li; Jianhui Li; Jiazhi Wang

Author(s): Guodong Zhou; Yanqiu Li; Jianhui Li; Jiazhi Wang

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An improved control structure for the tracking of sine command in a motion simulator

Author(s): Bernard Vau; Damien Ponceau; Mehdi Bussutil

Author(s): Bernard Vau; Damien Ponceau; Mehdi Bussutil

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Physical optics modeling of interferometer-based metrology systems (Conference Presentation)

Author(s): Site Zhang; Huiying Zhong; Rui Shi; Christian Hellmann; Frank Wyrowski

Author(s): Site Zhang; Huiying Zhong; Rui Shi; Christian Hellmann; Frank Wyrowski

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Extending wavefront sensing range of phase diversity

Author(s): Zhaojun Yan; Pengqian Yang

Author(s): Zhaojun Yan; Pengqian Yang

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Faster region-based convolutional neural network method for estimating parameters from Newton's rings

Author(s): Chen-Chen Ji; Ming-Feng Lu; Jin-Min Wu; Zhen Guo; Feng Zhang; Ran Tao

Author(s): Chen-Chen Ji; Ming-Feng Lu; Jin-Min Wu; Zhen Guo; Feng Zhang; Ran Tao

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Hyperspectral imager calibration using ceramic color tiles (Conference Presentation)

Author(s): Matti Eskelinen; Clarence J. Zarobila; David W. Allen

Author(s): Matti Eskelinen; Clarence J. Zarobila; David W. Allen

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Performance enhancement of a BSDF test bench using an algorithm fed with laser-tracker measurements

Author(s): L. Clermont; C. Michel; E. Mazy

Author(s): L. Clermont; C. Michel; E. Mazy

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Simulation of computational ghost imaging: application for 3D measurement

Author(s): Christoph Freitag; Peter Kühmstedt; Gunther Notni; Herbert Gross

Author(s): Christoph Freitag; Peter Kühmstedt; Gunther Notni; Herbert Gross

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Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method

Author(s): Matthew Thomas; Rong Su; Nikolay Nikolaev; Jeremy Coupland; Richard Leach

Author(s): Matthew Thomas; Rong Su; Nikolay Nikolaev; Jeremy Coupland; Richard Leach

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Optical time domain reflectometer for precision measurement of signal delay in optical fiber

Author(s): D. Prokhorov; S. S. Donchenko; O. V. Kolmogorov; E. V. Chemesova

Author(s): D. Prokhorov; S. S. Donchenko; O. V. Kolmogorov; E. V. Chemesova

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ELT-HIRES the high-resolution spectrograph for the ELT: simulation results of polarimetric aberrations for the polarimetric module

Author(s): I. Di Varano; S. Yuan; M. Woche; K. G. Strassmeier; M. Weber

Author(s): I. Di Varano; S. Yuan; M. Woche; K. G. Strassmeier; M. Weber

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Estimation of reflectance factors and their uncertainties from multiple measurements (Conference Presentation)

Author(s): Matti A Eskelinen; John Lu

Author(s): Matti A Eskelinen; John Lu

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Superaccurate camera calibration via inverse rendering

Author(s): Morten Hannemose; Jakob Wilm; Jeppe Revall Frisvad

Author(s): Morten Hannemose; Jakob Wilm; Jeppe Revall Frisvad

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Transmission telescope optical metrology (Conference Presentation)

Author(s): Viviana Vladutescu; Aaron J. Swank; Dzu K. Le; Calvin R. Robinson; Félix A. Miranda; Victor Pena; Katherine Chun

Author(s): Viviana Vladutescu; Aaron J. Swank; Dzu K. Le; Calvin R. Robinson; Félix A. Miranda; Victor Pena; Katherine Chun

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Determination of alternative monitoring wavelength to increase the accuracy of measuring the layers thickness during the thin films manufacture

Author(s): Thai Phi Ngo; L. A. Gubanova; Van Hoa Pham

Author(s): Thai Phi Ngo; L. A. Gubanova; Van Hoa Pham

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Development of a measuring system based on the principles of stereo vision

Author(s): Kseniia Ezhova; Duy Hung Nguyen; Dmitry Fedorenko

Author(s): Kseniia Ezhova; Duy Hung Nguyen; Dmitry Fedorenko

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Modelling of direct laser writing in multilayer absorbing medium

Author(s): Anton Saetchnikov; Elina Tcherniavskaia; Vladimir Saetchnikov; Andreas Ostendorf

Author(s): Anton Saetchnikov; Elina Tcherniavskaia; Vladimir Saetchnikov; Andreas Ostendorf

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Phase dispersion measurement on laser mirrors using fringe free spectral interferometry

Author(s): K. Csonti; G. Mészáros; A. P. Kovács

Author(s): K. Csonti; G. Mészáros; A. P. Kovács

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Enhancing detail of 3D terrain models using GAN

Author(s): Vladimir Gorbatsevich; Mikhail Melnichenko; Oleg Vygolov

Author(s): Vladimir Gorbatsevich; Mikhail Melnichenko; Oleg Vygolov

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Modeling of spectroradiometric error due to unoptimized choiсe of array photodetector for integrated photosynthetically active radiation spectroradiometer

Author(s): Sergei S. Baev; Valery V. Korotaev; Vladimir N. Kuzmin; Ivan S. Nekrylov; Joel J. P. C. Rodrigues; Konstantin A. Tomskiy

Author(s): Sergei S. Baev; Valery V. Korotaev; Vladimir N. Kuzmin; Ivan S. Nekrylov; Joel J. P. C. Rodrigues; Konstantin A. Tomskiy

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High-order transmissive diffraction grating for high-resolution spectral systems

Author(s): V. I. Kazakov; O. D. Moskaletz; M. A. Vaganov

Author(s): V. I. Kazakov; O. D. Moskaletz; M. A. Vaganov

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Error estimation due to approximations in Shack-Hartmann sensor based measurement of high slope freeform wavefront

Author(s): Ashish Dwivedi; Kamal K. Pant; Dali R. Burada; Gufran S. Khan; Anurag Sharma

Author(s): Ashish Dwivedi; Kamal K. Pant; Dali R. Burada; Gufran S. Khan; Anurag Sharma

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Calculation of intensity distribution from a wavefront using ray-counting method

Author(s): Manuel Campos-García; Ángel Eugenio Martínez-Rodríguez; Fermín Salomon Granados-Agustín

Author(s): Manuel Campos-García; Ángel Eugenio Martínez-Rodríguez; Fermín Salomon Granados-Agustín

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A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers

Author(s): Van Ba Nguyen; Ludmila Aleksandrovna Gubanova; Dinh Bao D. B. Bui

Author(s): Van Ba Nguyen; Ludmila Aleksandrovna Gubanova; Dinh Bao D. B. Bui

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Evaluation of the aberrations of a PDMS lens

Author(s): Manuel Campos-García; Ángel Eugenio Martínez-Rodríguez; Oliver Huerta-Carranza; Celestino Vargas-Alfredo; Agustín Santiago-Alvarado; Victor Iván Moreno-Oliva

Author(s): Manuel Campos-García; Ángel Eugenio Martínez-Rodríguez; Oliver Huerta-Carranza; Celestino Vargas-Alfredo; Agustín Santiago-Alvarado; Victor Iván Moreno-Oliva

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Modelling and tolerance analysis of volume-phase gratings in complex dispersive units

Author(s): Andrey N. Melnikov; Maxim K. Bakshaev; Eduard R. Muslimov; Ilya A. Guskov

Author(s): Andrey N. Melnikov; Maxim K. Bakshaev; Eduard R. Muslimov; Ilya A. Guskov

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A fully coupled diffusional-mechanical formulation for growth kinetics of precipitates in laser powder bed fusion process using a phase field approach

Author(s): Fikret Kh. Mirzade

Author(s): Fikret Kh. Mirzade

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On modeling of heat transfer and molten pool behavior in multi-layer and multi-track laser additive manufacturing process

Author(s): A. V. Dubrov; F. Kh. Mirzade; V. D. Dubrov

Author(s): A. V. Dubrov; F. Kh. Mirzade; V. D. Dubrov

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A flexible and simplified calibration procedure for fringe projection profilometry

Author(s): Raúl Vargas; Andrés G. Marrugo; Jesus Pineda; Lenny A. Romero

Author(s): Raúl Vargas; Andrés G. Marrugo; Jesus Pineda; Lenny A. Romero

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Measurement of errors by axial misalignment and tilt of the null screen used in experimental arrangements by deflectometry

Author(s): Diana Castán-Ricaño; Fermín Granados-Agustín; Andrea Muñoz-Potosi; Gabriel Valdivieso-González; Elizabeth Percino-Zacarías; Maximino Avendaño-Alejo; Alejandro Cornejo-Rodríguez

Author(s): Diana Castán-Ricaño; Fermín Granados-Agustín; Andrea Muñoz-Potosi; Gabriel Valdivieso-González; Elizabeth Percino-Zacarías; Maximino Avendaño-Alejo; Alejandro Cornejo-Rodríguez

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Design of a two-mirror telescope using a free-form surface for the primary mirror

Author(s): J. J. Alvarado-Martínez; F. S. Granados-Agustín; S. Vázquez-Montiel; M. E. Percino-Zacarías; A. Cornejo-Rodríguez

Author(s): J. J. Alvarado-Martínez; F. S. Granados-Agustín; S. Vázquez-Montiel; M. E. Percino-Zacarías; A. Cornejo-Rodríguez

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