Proceedings Volume 10848

Micro-Optics and MOEMS

Yuelin Wang, Huikai Xie
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Proceedings Volume 10848

Micro-Optics and MOEMS

Yuelin Wang, Huikai Xie
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Volume Details

Date Published: 14 December 2018
Contents: 2 Sessions, 17 Papers, 0 Presentations
Conference: International Symposium on Optoelectronic Technology and Application 2018 2018
Volume Number: 10848

Table of Contents

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Table of Contents

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  • Front Matter: Volume 10848
  • Micro Optics and MOEMS
Front Matter: Volume 10848
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Front Matter: Volume 10848
This PDF file contains the front matter associated with SPIE Proceedings Volume 10848, including the Title Page, Copyright information, Table of Contents, Author and Conference Committee lists.
Micro Optics and MOEMS
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Intensifier performance test technology development
Bin Liu, WenGang Hu, XiShan Wu
Since the inception of the first infrared tube, the ability of humans to see objects at night has begun to be met, night vision technology for night observation with photoelectric imaging continues to develop, infrared, low-light night vision technology has emerged one after another, active and passive night vision technology Constantly updated, humans can more and more clearly see the dark night scenery. The core device of night vision technology is like a booster. Its working principle is to first conduct photoelectric conversion, and then use the micro-channel plate to enhance the electronic signal, and finally the electro-optical conversion to achieve the weak light enhancement. The image intensifier itself is a type of device that amplifies weak signals. With the development of science and technology, especially the appearance of microchannel plates, the discovery of negative electron affinity cathodes, and the improvement of optical fiber manufacturing processes, the development of image intensifiers has experienced the first generation of image intensifiers, and the second with microchannel plates. Generation of image intensifiers, third generation image intensifiers using negative electron affinity cathodes, and fourth generation image intensifiers with automatic gated power. At the same time, there are also super second and third generation image intensifiers that are improved on the basis of the second and third generation image intensifiers. The performance of the super-generation image intensifier is not much different from that of the next-generation image intensifier. As far as the development of image intensifiers is concerned, there are many types. How to distinguish the advantages and disadvantages of image intensifiers requires specific parameters. Due to the various aberrations in the electron optical system, the scattering of incident electrons and emitted electrons by the phosphor screen, the limitation of the particle size of the phosphor, and the scattering of light and light from the coupling elements between the stages, the luminance distribution is distorted, and the output is The sharpness of the image drops. Resolution refers to the ability of an imaging device to immediately distinguish the images of two adjacent objects. The detection resolution is the simplest and most commonly used method for assessing the imaging quality of a tube. The method of the resolution of the enhancer resolution is divided into two types according to the resolution determination method: subjective test method and objective test method. With the development of technologies such as digital image processing and computer programming, the objective test method has become increasingly rich in means of implementation, and the test accuracy has been continuously improved. It has become a new research direction for resolution test technology. The noise performance of the image intensifier is a major factor limiting its effective viewing distance and image quality. The presence of background noise can reduce the contrast of the image, affect the sharpness of the image, and even cause the weak image to be overwhelmed and unrecognizable. Therefore, studying the noise characteristics of the LLL enhancer not only helps deepen the understanding of the noise laws in the imaging process, but also provides effective theoretical guidance and technical support for reducing image noise and improving imaging quality, and can further improve the low-light imaging system. The performance to make it work in the best mode. At present, some achievements have been made in the research of low-light image intensifier detection technology. This paper summarizes the previous studies and looks forward to the future development. It is hoped that it can provide some ideas for the further study of image intensifier performance testing technology.
Orbital rotation of multi-particle arrays in a dual-fiber optical trap
Kunshan Liu, Yuanyuan Li, Guangzong Xiao, et al.
We propose a new and versatile way for optical orbital rotation of microscopic sized multi-particle arrays in a transversely misaligned dual-fiber optical trap. A PDMS(Polydimethylsiloxane) chip is designed to adjust the transverse offset distance between two fibers. It is possible to control the orbital rotation frequency and perimeter by varying the transverse offset distance without external influences. Experimental results show that there is a threshold value, beyond which the particles will rotate in a certain trajectory. The threshold values of the transverse offset required to initiate orbital rotation was found to be different for different number particle arrays. The proposed optical manipulation technique has been verified to be useful for cell sorting, optical binding and assembly of microstructures.
Refractive index detection of nanolitre samples in a microfluidic chip with a Michelson interferometer
Yangcheng Luo, Huiqing Chen, Kun Liu, et al.
A Michelson interferometer is designed for the refractive index detection of nanolitre samples in a microfluidic chip. A He-Ne laser beam (power of 0.5mW) is divided into a detection beam and a reference beam by a beam splitter. Equal inclination interference patterns (circular fringes) formed by the reference beam and the detection beam passing through the chip channel (width of 65μm and depth of 50μm) are observed clearly. The intensity of the central part of the interference pattern changes while rotating the chip. Signals of the light intensity versus the rotation angle are collected by a detector (consisted of a fiber and a photomultiplier) and recorded by a computer. By rotating the chip from 0° to +17°, signals are measured when the chip channel is filled with air, water and sodium hydroxide solution NaOH (with a refractive index of 1.3450). Fitting the signal curves with Origin program in a theoretical equation, the refractive indices of air, water and NaOH solution in the chip channel are derived. The results coincided basically with those measured by an Abbe refractometer.
Monte Carlo investigation of cell defects on detection properties in radial packed square-pore micro-channel optics
Micro-channel optics (MPO) is a two dimensional arrays of capillary channel EUV/X-ray imaging precision optics. Imaging quality and detection efficiency are crucial to EUV/X-ray detection. Radial packed square-pore type micro-channel optics (RPMPO) is a novel MPO, which is preferable to the cruciform focus of Square packed square-pore micro-channel optics (SPMPO, namely Lobster eye optics) geometry. Cell defects of micro-channel affect the imaging quality and detection efficiency seriously, however, which were inevitable in the MPO manufacturing. In this paper, characteristics of focusing images for standard and defect states RPMPOs were compared by ray trace method of Monte Carlo algorithm. Three main cell defects, such as Taper, Twist and Nonsquare, were investigated in the influence on the imaging quality and detection efficiency under different cell flaw sizes. Results indicated that under a constant illumination, Nonsquare defects of cell affected the detection efficiency most, twist defects did less, and taper defects did least. Besides, twist defects of cell affected the quality of focal image most, nonsquare defects did less, and taper defects did least. The detection efficiency decreasing obeyed the Boltzmann, Bidoseresp and Lorentz function as the increasing of conical degree, twist angle and fillet radius in taper, twist and nonsquare defect, respectively. The focal imaging quality deteriorating obeyed Expdec1, Expdec3 and Langevin distribution with the increasing of conical degree, twist angle and fillet radius in taper, twist and nonsquare defect, respectively.This results supplied a significant support for the future researches on curved MPO and EUV/X-ray optical system based on MPO.
Spoof surface plasmons on the corrugated metal surface with gradient groove depths
Yong-Qiang Liu, Liangsheng Li, Hongcheng Yin
Spoof surface plasmons (SSP) on the corrugated metal surfaces has attracted intense research interests and can find many interesting applications such as wave guiding, imaging, sensing, etc in microwave and terahertz (THz) band. Previous studies show that the intense near-field of SSP mode on the metallic grating can be used to develop a new enhanced radiation source which is induced by injected electron beam. In this paper, we study SSP mode on a modified metallic grating, i.e. the inverse L-shaped sub-wavelength metallic grooves. The general dispersion relation is obtained with a modal expansion method by solving field expressions in different regions along with proper boundary conditions. The theoretical result is also verified by finite integration method and good agreement is observed. Based on the dispersion result, a terahertz radiation source on the inverse L-shaped metallic grooves is proposed and studied by FDTD simulation. The results reveal that SSP mode can be efficiently excited by injected electron beam when the dispersion is matched well with each other. Also, the output power revolution of SSP mode and electron beam energy change are presented in the structure. The presented studies are instructive to design more efficient THz electronic sources based on the generation of SSP on the corrugated metal surface with gradient groove depth.
Study on angle detection capability of silicon waveguide grating coupler
Yang Gao, Yanfei Liu, Jiali Liao, et al.
Silicon waveguide grating coupler is one of the most important optoelectronic devices in optical communication system. We study on the angle detection capability of silicon waveguide grating coupler. The silicon on insulator (SOI) waveguide grating coupler is designed based on slab waveguide theory firstly. The parameters of the grating structure, which cannot be determined by slab waveguide theory, are optimized by finite difference time-domain (FDTD) solution, such as the grating length, the etch depth and the duty cycle. Simulations are carried out to test the angle detection capability of the silicon waveguide grating coupler. It is demonstrated that the silicon waveguide grating coupler can be used as an angular sensor, with a detection range of 25°.
Low loss terahertz devices based on polymer substrate
Liangping Xia, Hongyan Mao, Xinqun Zhang, et al.
The fabrication method of hard template substrate supporting in the lithography process is proposed to realize THz devices based on low loss polymer substrate with large effective area. Based on this method, the THz polarizer with single layered and double layered grating structure are fabricated and measured. The transmission spectra indicates that the loss of the polarizer is low and the polarization extinction ratio is as high as 55dB and 70dB for single and double layered samples respectively. The THz band stop filter result indicates that the loss keeps low and the filter band width is wider for the multi-layered metallic structure.
Micro-scanning mechanism design based on dynamic model
Li-wei Huang, Guang-li Sun, Jiang-peng Song, et al.
Micro-Scanning Mechanism (MSM) is the important component of super-resolution imaging/stabilization system. Through the MSM, the resolution of the infrared imaging system can be improved without increasing the total number of detection elements of the infrared focal plane detector, extending the working distance of the thermal imaging system and eliminating the detection blind zone caused by the small filling factor of the detector. This work was focused on the model-based design method of MSM, in order to improve the design efficiency and reduce design costs. The dynamic model of MSM was established, and the MSM design method based on this model was proposed. The structure and working principle of MSM were introduced, and the high-order resonance and axial coupling of MSM were analyzed. Based on this model, the main parameters of a certain MSM were designed. The simulation results meet the design requirements, effectively improving the design efficiency and reducing the design cost.
Research on the graphene oxide's dielectric constant at the microwave frequency of 9.231GHz
Keqin Zhao, Xiu Li, Yunting Chu, et al.
The dielectric constants of graphene oxide’s at 9.231GHz have been studied by cavity perturbation methods. 5g/ml and 2.5g/ml two different concentration graphene oxides were prepared and instilled into glass capillaries with the diameter of 0.9mm and 0.5mm. Based on the Independently developed heating system and temperature display device, the dielectric constants with different depth of microwave cavity were measured at different temperature from 18° to 38°. It found that the graphene oxide’s dielectric constants became lager when the depth increased in the cavity. In addition, it varied obviously when the diameters of the sample changed.
Ultra-sensitive fluorescence detection based on helical micro optical fiber
Qinnan Chen, Xuecui Mei, Ke Fang, et al.
A simple fabrication method of helical micro optical fibers (HMOFs) with controllable diameters and pitches based on micro-Weissenberg effect is proposed in this Letter. Single fibers with minimum diameter and pitch of 5 μm and 15 μm were directly written by near-field electrospinning of molten poly(methyl methacrylate) (PMMA). The morphology and transmission characteristics of single PMMA HMOFs were experimentally measured. The results showed that HMOFs have periodic modulation effect on transmitted light and show its potential as a micro-displacement sensor. Then a fluorescence detection structure based on HMOF is proposed, where HMOF was used to incoming the excitation light and collecting fluorescence. Experimental results show that for the fluorescence sensing of R6G aqueous solution, the fluorescence collection efficiency of HMOF was 4 times that of the micro optical fibers of the same diameter.
Split nanofocusing spots beyond diffraction limit via a new near-field plasmonic structure
The focusing spot beyond diffraction limit is critical to plasmonic direct-writing lithography. To improve the speed and precision of plasmonic direct-writing lithography, we design a new periodically repeated circular hole/elliptical ring plasmonic structure named as split-focusing structure used for producing two focusing spots under the incidence of linearly polarized plane wave at 633nm wavelength. It consists of SiO2 substrate and coated silver film with holes and slits of different shapes. By designing appropriate structure parameters to excite localized surface plasmon resonance, two split subwavelength spots are produced on the focal plane. Finite-difference time-domain (FDTD) method is used for numerical simulation. The simulation result indicates that the focal length of structure is 36nm and the full width at half maximum (FWHM) of single spot is 50nm. Both split spots can be used for direct writing so the speed of photoetching will be raised. The dual spots are both in circular shape, which is beneficial to improve the pattern precision. The influence of structure parameters on focusing performance is also analyzed to guide the practical fabrication of structure. The split-focusing structure designed in this paper also owns application values in data storage and non-contact sensing.
Design and analysis of a novel connective locking mechanism for future space mirrors assembly
A novel locking mechanism for future space mirrors assembly is presented. Using this locking mechanism, future primary mirror segments can be autonomously locked and unlocked. This compact design adopts passive locking mode, which improves the on-orbit autonomous assembly performance. In this paper, first, the design details and operation principle are addressed. Then, the failure conditions are discussed. By the external driving force, the static structural analysis and dynamic analysis are implemented to validate the design scheme. The final results show that the proposed locking mechanism avoids significant failure conditions and is considerably power efficient.
Resonance characteristics of TE mode in slotted photonic crystal microring resonator
Xueping Wang, Mei Kong, Yameng Xu, et al.
We propose to construct a microring resonator with a slotted photonic crystal nanobeam and demonstrate its basic resonance characteristics by numerical simulation. Resonance spectra and field localization in the ring at resonant wavelengths are calculated. It is found that in the slotted photonic crystal microring resonator, the optical field of the first passband is well confined in the slot zones between every two holes. Due to the large loss, the quality factor of the structure is less than that of the solid-core waveguide ring with the same parameters.
Estimating relative extent of scattering loss due to sidewall roughness in slot waveguides by nw model
Yu Wang, Mei Kong
We apply nw model to slot waveguides with three different cladding and filling materials and calculate nw at different structural parameters to reveal the influence of these parameters on the sidewall-roughness scattering loss. Based on the power density distribution and the mode field localization, we analyze the causes of the influence rules, which are also consistent with the trends of reported experimental data in literatures. The results of the calculation and analysis in this paper have a guiding significance for the design and processing of slot waveguides.
Optical design and analysis of a high resolution MOEMS accelerometer based on diffraction grating
Yuan Yao, Debin Pan, Anbing Geng, et al.
The design and analysis method of a MOEMS accelerometer consisting of a grating interferometry cavity and a micromachined sensing chip is presented in this paper. The grating interferometeric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror ,to realize a subnanometer resolution. With an ultrasensitive micromachined chip, the MOEMS accelerometer can finally achieve a few ug resolution. This paper combines the geometrical optics and nano optics design methods to simulate the whole system, analyses how the divergence angle, grating constant and the length of the interferometeric cavity influence the ultimate sensitivity. A new set of MOEMS accelerometer is proposed, the theoretical analysis shows that the acceleration sensitivity can achieve 1200 v/g, and the resolution remains 1.3ug.
Progress in atomic layer deposition based microchannel plate
Tao Xu, Qing Li, Yanglei Xu, et al.
Microchannel plate (MCP) is well known as the core component of image intensifiers and particle detectors. Atomic Layer Deposition (ALD), a powerful and precise thin film deposition technique, has been applied to improve the performance of MCPs by surface modification. In this study, ALD processes for both secondary electron emission (SEE) coatings and resistive coatings on MCPs has been investigated. Al2O3 films were deposited by ALD on traditional MCPs as SEE layers, and aluminum-doped zinc oxide (AZO) films were deposited on white MCPs (MCPs without firing hydrogen) as the resistive layer. The SEM results show good uniformity of the ALD layers inside MCP channels. We have made a preliminary exploration on the relationship between gain of MCP, thickness of SEE layer and reaction temperature. The gain of traditional MCPs with aspect ratio of 39:1 increases from 3200 to 14000 (@Bias Voltage = 800V) by coating a SEE layer under a specific condition. Additionally, the aging experiment result indicates that the liftime of MCPs (from 0.15C to 0.29C) has been extended. The resistance of MCPs can be tuned by changing the doping ratio and thickness of resistive layer. We have successfully found several ALD processes for the resistive coatings, which can control the resistance in the suitable range of MCPs (about 100MΩ@800V). The volt-ampere characteristics of MCP with resistive layer is approximately exponential function relation, which differ with traditional MCPs.