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Excimer Beam Applications
Editor(s): Anthony N. Pirri; Bernhard P. Piwczyk

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Volume Details

Volume Number: 0998
Date Published: 16 December 1988

Table of Contents
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Narrow-Band KrF Excimer Laser -- Tunable And Wavelength Stabilized
Author(s): Koich Wani; Yoshiro Ogata; Yoshiaki Watarai; Takuhiro Ono; Takeo Miyata; Reiji Sano; Yasuaki Terui
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Excimer Laser Light Delivery System For Micromachining
Author(s): K . J. Harte; B. P. Piwczyk
Show Abstract
Improved Beam Uniformity In Excimer Lasers
Author(s): U. Sowada; J. Sercel; H. J. Kahlert; D. Basting; L. Austin
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A Versatile Excimer Laser Processing System
Author(s): G . Darcy Poulin; Peter A. Eisele
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Bright Photoelectron Beams Emitted From Excimer-Laser Illuminated LaB6
Author(s): Peter E. Oettinger
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KrF Laser Induced Color Centers In Commercial Fused Silicas
Author(s): Gary C. Escher
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A Deep UV Imaging System For Lithography And Process Development
Author(s): Paul Michaloski; Paul Dewa
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Incorporating Beam Diagnostics Into UV Laser Delivery Systems
Author(s): W . B . Telfair; P. R. Yoder Jr.; C. A. Martin; R. L. Labinger; W. C. Fricke
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Temperature Changes During Photoablation Processes
Author(s): M. Steinmetz
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XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology
Author(s): Donald L. Singleton; George Paraskevopoulos; Robert S. Irwin; Roderick S. Taylor; Kurt E. Leopold
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Excimer-Laser Spectroscopy Of Polymeric Materials
Author(s): A. L. Rodgers; S. R. Ahmad
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Assisted Arf Excimer Photo-Etching Of Mercury Cadmium Telluride (MGT) Semiconductor
Author(s): Alain Azema; Jean Botineau; Philippe Gaucherel; Jean-Claude Roustan
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Industrial Microprocessing Applications Of Excimer Lasers
Author(s): J. Sercel; U. Sowada; H J Kahlert; D. Basting; L. Austin
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Advances In Excimer Laser Materials Processing
Author(s): G. Darcy Poulin; Peter A. Eisele
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Excimer Laser Induced Chemical Etching Of Silicon With Halogen-Containing Gases
Author(s): W. Sesselmann; F. Bachmann
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Excimer Laser Curing Of Polymer Coatings
Author(s): David Klick; M. Alfred Akerman; George L. Paul; Darko Supurovic; Haruki Tsuda
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Focussed Excimer Laser Beams: A Technique For Selective Micropatterning
Author(s): Jean M. Hagerhorst; Modest M. Oprysko
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Laser-Induced Forward Transfer Of Metal Oxides To Trim The Frequency Of Surface Acoustic Wave Resonator Devices
Author(s): James A. Greer; Thomas E. Parker
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