Share Email Print


Laser Processing of Semiconductor Devices
Editor(s): Charles C. Tang

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 0385
Date Published: 9 August 1983

Table of Contents
show all abstracts | hide all abstracts
Recent Advances In Laser Processing Of Semiconductors
Author(s): A. Kestenbaum
Show Abstract
Novel Laser Scanning Techniques For Si-On-Insulator Devices
Author(s): L. E. Trimble; G. K. Celler
Show Abstract
Laser Applications To Semiconductor Device Processing
Author(s): Rajiv R. Shah
Show Abstract
Some New Laser Processing Applications In Microelectronics
Author(s): Donald L. Parker
Show Abstract
Gas Immersion Laser Diffusion (GILDing)
Author(s): Robert J. Pressley
Show Abstract
Laser Activated Flow For Integrated Circuit Fabrication
Author(s): M. Delfino
Show Abstract
Melt Depth And Regrowth Kinetics In Pulsed Laser Annealing Of Silicon And Gallium Arsenide
Author(s): G. J. Galvin; Michael O. Thompson; J. W. Mayer; P. S. Peercy; R. B. Hammond
Show Abstract
Circuit Simulation Of Three-Dimensional Metal Oxide Semiconductor Field Effect Transistor (MOSFET) Device Structures In Beam-Recrystallized Polysilicon Films
Author(s): James F. Gibbons; Martin D. Giles; Kwing F. Lee; James T. Walker
Show Abstract
Conduction Processes In Polysilicon: Effects Of Laser Restructuring
Author(s): A. N. Khondker; R. R. Shah; D. M. Kim
Show Abstract
Electronic Properties Of Grain Boundaries In Polycrystalline Silicon
Author(s): E. S. Yang; E. Poon; H. L. Evans; W. Hwang; J. S. Song; C. M. Wu
Show Abstract
Effects Of Grain Boundaries On Channel Conduction In Thin Film Polysilicon On Silicon-Dioxide Metal Oxide Semiconductor Field Effect Transistors (SOI MOSFETs)
Author(s): J. G. Fossum; A. Ortiz; H.-K Lim; H.-W. Lam
Show Abstract
High-Performance Thin Film Transistors In CO[sub]2[/sub] Laser Crystallized Silicon On Quartz
Author(s): A. Chiang; W. P. Meuli; N. M. Johnson; M. H. Zarzycki
Show Abstract
Characterization Of Laser Blown Molydisilicide Links
Author(s): Scott Wills; Joe McPherson
Show Abstract
Laser Microsurgery And Fabrication Of Integrated Circuits
Author(s): J. R. Moulic; Y. C. Kiang; R. W. Lang; J. C. Logue
Show Abstract
Laser Redundancy: Past, Present, And Future
Author(s): Edward J. Swenson
Show Abstract
Laser Targeting Considerations In Redundant Memory Repair
Author(s): D. Smart; R. Reilly; B. Wells
Show Abstract
Precision Laser Irradiation System
Author(s): Eugene G. Arthurs; Kuo-Ching Liu
Show Abstract
Laser Microchemistry For Direct Writing Of Microstructures
Author(s): R. M. Osgood Jr.; D. J. Ehrlich; T. F. Deutsch; D. J. Silversmith; A. Sanchez
Show Abstract
Maskless Laser Plating Techniques For Microelectronic Materials
Author(s): R. J. von Gutfeld; M. H. Gelchinski; L. T. Romankiw
Show Abstract
Microelectronic Thin Film Deposition By Ultraviolet Laser Photolysis
Author(s): P. K. Boyer; C. A. Moore; R. Solanki; W. K. Ritchie; G. A. Roche; G. J. Collins
Show Abstract
Rapid Laser-Induced Chemical Etching Of Semiconductors
Author(s): F. A. Houle
Show Abstract
Laser Chemical Etching Method For Drilling Vias In GaAs
Author(s): Armin W. Tucker; Milton Birnbaum
Show Abstract
Laser Plasma X-Ray Source Optimization For Lithography
Author(s): Harold M. Epstein; Philip J. Mallozzi; Bernerd E. Campbell
Show Abstract
Laser-Based Studies Of Chemical Vapor Deposition
Author(s): W. G. Breiland; M. E. Coltrin; Pauline Ho
Show Abstract

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?