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Proceedings Paper

Simulation of real-time large-scale absolute distance measurement with a pair of femtosecond frequency comb lasers
Author(s): Yang Li; Qian Zhou; Kai Ni; Guanhao Wu; Xiaorui Qiao
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Paper Abstract

Absolute distance measurement is essential in large-scale equipment manufacturing and scientific projects. Nowadays, sophisticated equipment manufacture demands for high-precision ranging with a high speed. Several raging methods utilizing the wide spectral range and stable frequency intervals of femtosecond frequency comb laser can achieve a high precision, but most of such systems suffer from relative low speed. Fortunately, the ranging method based on a pair of femtosecond frequency comb lasers can potentially resolve such problem. Combining time-of-flight and interferometry method, the measurement can accomplish rapid raging in a measurement period of 0.2ms, and achieve higher precision by interferometry after averaging of many periods. We performed a simulation of this method in Matlab/Simulink. The precision can achieve ~10nm in ideal simulation environment. By error analysis we estimated the data processing system, and gave the appropriate parameters of detector and A/D sampling. It comes to a conclusion that detector with relative long response time of ~7nm or about can be adopted, and fast Fourier transformation (FFT) of 16384 points contributes to higher precision. With such parameters, it is possible to realize real-time raging performed on field-programmable gate array (FPGA) with high precision.

Paper Details

Date Published: 20 November 2012
PDF: 7 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856303 (20 November 2012); doi: 10.1117/12.999976
Show Author Affiliations
Yang Li, Tsinghua Univ. (China)
Qian Zhou, Tsinghua Univ. (China)
Kai Ni, Tsinghua Univ. (China)
Guanhao Wu, Tsinghua Univ. (China)
Xiaorui Qiao, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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