The requirements of inner profile measurement of pipes and holes become recently larger and larger, and applications of inner profile measurement have rapidly expanded to medical field as well as industrial fields such as mechanical, automobile and heavy industries. We have proposed measurement method by incorporating a ring beam device that produces a disk beam and have developed various probes for different inner profile measurement. To meet request for applying to smaller diameter pipes, we tried to improve the ring beam light source using a conical mirror, optical fiber collimator and a laser diode. At this moment a probe with the size of 5 mm in diameter has been realized.

Date Published: 20 November 2012
PDF: 7 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630L (20 November 2012); doi: 10.1117/12.999878

Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)