Ellipsometer enables to characterize optical properties of materials and thin films quantitatively via the measurement of the ellipsometric parameters, Psi (Ψ) and Delta (Δ), of the reflected polarized light by specimen. The ellipsometry surgery began to be applied to an increasingly wide range of areas, such as physics, chemistry, materials and biology. The main advantage of the elliptical polarization measurement technique is to measure a long time, take a large wavelength range, the measurement angle, no damage to the sample, measurement results are accurate. By the principle analysis of the ellipsometer, In this paper ellipsometer is used to measurement electric field component amplitude ratio Ψ and electric field component phase difference Δ of the satellite surface coated materials, and then set the angle of incidence and wavelength, the optical constants (index of refractive n and extinction coefficient k) can be obtained. On the measurement results in different incident in an optimization modeling, also has access to more parameters description. The experiments show that the measurement results and fitting results match well within the spectral range 300 nm-1000 nm range. This paper is offer methods of measurement and modeling for characterize optical properties of materials and thin films.

Date Published: 26 November 2012
PDF: 6 pages
Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856315 (26 November 2012); doi: 10.1117/12.999870

Published in SPIE Proceedings Vol. 8563:
Optical Metrology and Inspection for Industrial Applications II
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)