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Proceedings Paper

Continuum Modeling Of rf Glow Discharges
Author(s): Herbert H. Sawin; Evangelos Gogolides
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Paper Abstract

The electrodynamics of rf glow discharges has been described by a continuum model that simulates the creation, loss, energy gain and loss, and transport of charged particles within the discharge. Detailed comparisons between the model predictions and experimental measurements have been made to test the model; e.g., the spatially and temporally resolved emission of SF6 and Ar discharges. The model which uses no adjustable parameters, has been shown to be in good agreement with all measures to date. In previous continuum models', an initial guess is made for the concentration and energy of the charged species and then the set of differential equations are integrated until the oscillatory steady state is reached. We have developed a mathematical algorithm which solves directly for the oscillatory steady-state, avoiding the time integration and typically reducing the computation time by several orders of magnitude.

Paper Details

Date Published: 30 January 1990
PDF: 11 pages
Proc. SPIE 1185, Dry Processing for Submicrometer Lithography, (30 January 1990); doi: 10.1117/12.978060
Show Author Affiliations
Herbert H. Sawin, Massachusetts Institute of Technology (United States)
Evangelos Gogolides, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1185:
Dry Processing for Submicrometer Lithography
James A. Bondur; Alan R. Reinberg, Editor(s)

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