In this paper, an optical fabrication process is introduced in detail, which is about achieving ultra-precision surface by iteration of ion beam figuring (IBF) and supersmooth polishing technology. Developed as a new technology to achieve supersmooth surface, Numerical controlled micro-jet polishing (MJP) technology is also introduced. 100mm-diameter fused silica is used as the sample. In the process, the surface is superpolished with MJP at first, then IBF is used to correct the figure, and finally MJP is applied again to finish iteration process. The path for IBF is raster scanning, and MJP processes in a spiral way. The figure and roughness of the surface are tested and analyzed with interferometer and atomic force microscope (AFM). The results indicate that ultra-precision optical surface is achieved by the iteration process with figure accuracy of 0.879nmrms, mid-spatial frequency and high-spatial frequency roughness of 0.119nmrms and 0.0726nmrms respectively.

Date Published: 16 October 2012
PDF: 6 pages
Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841620 (16 October 2012); doi: 10.1117/12.975836

Published in SPIE Proceedings Vol. 8416:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)