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Proceedings Paper

Characterization of commercial dyes for PMMA bilayer systems
Author(s): Patrick J. Paniez; Gilles R. Amblard; Elisabeth C. Dechenaux; Andre P. Weill
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Paper Abstract

The absorption properties of the well-known coumarin dyes are evaluated at the 436 nm g line for PMMA bilayer systems. Their properties are compared with those of other commercial products. The main requirements to be met are : good solubility in PMMA solutions, an absorption spectrum adapted to bilayer processes and thermal stability. Several azo dyes have been selected from among a large number of compounds and are proposed as an advantageous alternative to coumarin dyes. The implementation of one of these selected dyes in a bilayer process is given as an example. A good dimensional control is obtained for 1 μm lines over critical topographies.

Paper Details

Date Published: 17 September 1987
PDF: 6 pages
Proc. SPIE 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (17 September 1987); doi: 10.1117/12.975610
Show Author Affiliations
Patrick J. Paniez, CNET-CNS (France)
Gilles R. Amblard, CNET-CNS (France)
Elisabeth C. Dechenaux, CNET-CNS (France)
Andre P. Weill, CNET-CNS (France)

Published in SPIE Proceedings Vol. 0811:
Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
Harry L. Stover; Stefan Wittekoek, Editor(s)

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