The absorption properties of the well-known coumarin dyes are evaluated at the 436 nm g line for PMMA bilayer systems. Their properties are compared with those of other commercial products. The main requirements to be met are : good solubility in PMMA solutions, an absorption spectrum adapted to bilayer processes and thermal stability. Several azo dyes have been selected from among a large number of compounds and are proposed as an advantageous alternative to coumarin dyes. The implementation of one of these selected dyes in a bilayer process is given as an example. A good dimensional control is obtained for 1 μm lines over critical topographies.

Date Published: 17 September 1987
PDF: 6 pages
Proc. SPIE 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (17 September 1987); doi: 10.1117/12.975610

Published in SPIE Proceedings Vol. 0811:
Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
Harry L. Stover; Stefan Wittekoek, Editor(s)