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Proceedings Paper

Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration
Author(s): Yaguo Li; Yongbo Wu; Jian Wang; Qiao Xu; Wei Yang; Yinbiao Guo
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Paper Abstract

Ultrasonic vibration assisted machining with harder abrasives than the material to be machined can improve the quality of machined surface and manufacturing efficiency. Therefore, we integrated ultrasonic vibration (UV) into a recently developed technique chemo-mechanical bound-abrasive polishing in anticipation of further increasing the material removal rate (MRR) and/or surface roughness. The preliminary results indicate that ultrasonic vibration assisted chemo-mechanical bound-abrasive polishing can lead to increased material removal rate of manufactured optics while leaving the surface roughness comparable to conventional chemo-mechanical bound-abrasive polishing. The great MRR is attributed to the superiority of UV-assisted chemo-mechanical bound-abrasive polishing in discharging resultant swarf during machining.

Paper Details

Date Published: 16 October 2012
PDF: 6 pages
Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841606 (16 October 2012); doi: 10.1117/12.975135
Show Author Affiliations
Yaguo Li, Akita Prefectural Univ. (Japan)
Chengdu Fine Optical Engineering Research Ctr. (China)
Yongbo Wu, Akita Prefectural Univ. (Japan)
Jian Wang, Chengdu Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Chengdu Fine Optical Engineering Research Ctr. (China)
Wei Yang, Xiamen Univ. (China)
Yinbiao Guo, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 8416:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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