
Proceedings Paper
Polarized bidirectional reflectance distribution function for optical substrate and different filmsFormat | Member Price | Non-Member Price |
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Paper Abstract
Laser light scattering is a powerful tool for its noncontract nature and its convenience to nondestructive examination in the semiconductor industry. In order to detect the quality of the substrate and coated optical elements effectively, firstorder vector perturbation microfacet polarized light scattering model is established by microfacet theory and the
polarized bidirectional reflectance distribution function (PBRDF) is derived. PBRDF describes both the scattering
characteristics and the polarization characteristics of optical substrate. The scattering field is certain with a given
microroughness optical substrate. Therefore, the optical information can be inversed by the study of scattering field. The numerical value simulates and analyzes the influence of the thickness of SiO2 and TiO2 films on the PBRDF, at interfaces roughness perfectly correlated and completely uncorrelated model, respectively. The results show that the PBRDF is coincident little by little at interfaces roughness perfectly correlated and completely uncorrelated model with the increment of thickness of SiO2 films. And film can perfectly replicate surface profile of substrate at this time. With the increment of thickness of TiO2 films, the PBRDF becomes larger and larger, which illustrated that TiO2 film has
smoothing effect on the roughness of the substrate. The optical information of the substrate can be measured by
calculating the PBRDF of different films, which provides theoretical basis for quality evaluation and identify the
information of contaminants detected in the semiconductor industry.
Paper Details
Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170J (15 October 2012); doi: 10.1117/12.974317
Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170J (15 October 2012); doi: 10.1117/12.974317
Show Author Affiliations
Gong Lei, Xi’an Technological Univ. (China)
Zhensen Wu, Xidian Univ. (China)
Zhensen Wu, Xidian Univ. (China)
Honglu Hou, Xi'an Technological Univ. (China)
Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)
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