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Proceedings Paper

Loss free mask production with inspection, repair, and pellicle handling systems
Author(s): Makoto Yonezawa; Tosho Cho; Makoto Takano; Masahiro Toriguchi; Masafumi Shinoda; Mitsuru Hamakawa; Seiki Matsumoto
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Paper Abstract

Un-repairable defects cause not only delivery delay but also un-negligible loss cost in Large Size Photo Mask (LSPM) Productions. In order to avoid such loss, Lasertec provides various types of inspection and repair systems. The Large Size Substrate inspection system LB79 works for qualifying substrates for LSPMs. In a LSPM maker, the resist coated blanks can be inspected with LIR79i, the In-process Inspection and Repair system. ADI (After Develop Inspection) also can be performed with the same LIR79i as well as Resist Pattern Repairs with the Laser shots and the ink dispensing.

Paper Details

Date Published: 29 June 2012
PDF: 10 pages
Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410P (29 June 2012); doi: 10.1117/12.970391
Show Author Affiliations
Makoto Yonezawa, Lasertec Corp. (Japan)
Tosho Cho, Lasertec Corp. (Japan)
Makoto Takano, Lasertec Corp. (Japan)
Masahiro Toriguchi, Lasertec Corp. (Japan)
Masafumi Shinoda, Lasertec Corp. (Japan)
Mitsuru Hamakawa, Lasertec Corp. (Japan)
Seiki Matsumoto, Lasertec Corp. (Japan)

Published in SPIE Proceedings Vol. 8441:
Photomask and Next-Generation Lithography Mask Technology XIX
Kokoro Kato, Editor(s)

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