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Proceedings Paper

Nonlinear Characteristics Of A Stylus Profilometer
Author(s): S. R. Wilson; G A. Al-Jumaily; J. R. McNeil
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Paper Abstract

Stylus surface profiling instruments have found application in the characterization of microroughness. Recently, Al-Jumaily [1] has compared data obtained using a stylus profilometer and an optical scatterometer to characterize a metal surface. The stylus profilometer data was found to be inconsistent with the optical data. In resolving this discrepancy, the "transfer functions" of the instruments were identified as the source of the disagreement. Upon investigation of the stylus properties using a computational model, the stylus is found to provide a nonlinear, lowpass filter-like measurement of surface structure. The data provided by the stylus instrument cannot be easily post-processed to give an accurate profile of the surface. These results will be discussed.

Paper Details

Date Published: 1 January 1987
PDF: 3 pages
Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); doi: 10.1117/12.967467
Show Author Affiliations
S. R. Wilson, University of New Mexico (United States)
G A. Al-Jumaily, University of New Mexico (United States)
J. R. McNeil, University of New Mexico (United States)

Published in SPIE Proceedings Vol. 0818:
Current Developments in Optical Engineering II
Robert E. Fischer; Warren J. Smith, Editor(s)

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