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Proceedings Paper

A Differential Polarized Light Interferometric System For Measuring Flatness Of Magnetic Disks
Author(s): Wang Jia; Li Da-Cheng; Chen Ye; Du Ling; Cao Mang
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Paper Abstract

A kind of differential polarizdd laser interferometric system for non-contact and dynamic measurement of the flatness characteristic of magnetic disks without the effect of the axial vibration is described in this papper.

Paper Details

Date Published: 1 January 1987
PDF: 2 pages
Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); doi: 10.1117/12.967356
Show Author Affiliations
Wang Jia, Tsinghua University (China)
Li Da-Cheng, Tsinghua University (China)
Chen Ye, Tsinghua University (China)
Du Ling, Tsinghua University (China)
Cao Mang, Tsinghua University (China)

Published in SPIE Proceedings Vol. 0813:
Optics and the Information Age
Henri H. Arsenault, Editor(s)

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