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Proceedings Paper

Heterodyne Sensors Using Retardation At- Total Reflection --Displacement Sensor-
Author(s): T. Yoshino; T. Hashimoto
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Paper Abstract

Noncontact and high sensitivity are the most important abilities of optical metrology. To achieve high sensitivity interference systems are most usually used, but they are generally unstable. In this paper we present a new optical sensing scheme which can sensitively and stably measure various quantities.

Paper Details

Date Published: 1 January 1987
PDF: 2 pages
Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); doi: 10.1117/12.967168
Show Author Affiliations
T. Yoshino, The Tokyo University (Tokyo)
T. Hashimoto, The Tokyo University (Tokyo)

Published in SPIE Proceedings Vol. 0813:
Optics and the Information Age
Henri H. Arsenault, Editor(s)

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