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Proceedings Paper

Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer
Author(s): Gary A. Burns; James A. Schoeffel
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Paper Abstract

ATEQ Corporation has developed a high precision, high performance optical lithography system, the CORE-2000, based on scanning laser technology and optimized for the high speed writing of 5X and 10X reticles. A detailed evaluation of this system has been made using Nikon 21 measurement systems, KLA inspection systems, and throughput benchmark test patterns. This paper briefly describes the CORE-2000 and presents the results of this evaluation including registration performance, critical dimension control, defect control and throughput.

Paper Details

Date Published: 1 January 1987
PDF: 8 pages
Proc. SPIE 0772, Optical Microlithography VI, (1 January 1987); doi: 10.1117/12.967059
Show Author Affiliations
Gary A. Burns, ATEQ Corporation (United States)
James A. Schoeffel, ATEQ Corporation (United States)

Published in SPIE Proceedings Vol. 0772:
Optical Microlithography VI
Harry L. Stover, Editor(s)

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