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Proceedings Paper

Imaging Of Thick Phase Gratings
Author(s): R. A. Rupp; G. Wittenbecher; E. Kratzig
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Paper Abstract

Imaging by a transmission microscope and microphotometry are the basis of a new method to analyze thick refractive index gratings. The method permits to determine not only the fundamental and higher Fourier coefficients of the dielectric grating, but also their phase relationship. It is shown, how gratings with a depths profile can be analyzed.

Paper Details

Date Published: 18 May 1987
PDF: 4 pages
Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); doi: 10.1117/12.966795
Show Author Affiliations
R. A. Rupp, Universitat Osnabruck (Germany)
G. Wittenbecher, Universitat Osnabruck (Germany)
E. Kratzig, Universitat Osnabruck (Germany)

Published in SPIE Proceedings Vol. 0702:
International Topical Meeting on Image Detection and Quality
Lucien F. Guyot, Editor(s)

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