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Proceedings Paper

Focused Ion Beam Modification And Patterning Of High TC Superconductors
Author(s): L. R. Harriott
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Paper Abstract

High-resolution patterning of thin-film high temperature superconductors is necessary in the development of device applications of these new materials. Such fine-line structures are necessary in the fabrication of devices such as superconducting quantum interference devices (SQUIDS), transmission lines and others. Furthermore, high spatial resolution patterning can be an important tool in studying the fundamental properties of the films themselves. Focused ion beam patterning has recently been applied to YBaCuO thin films. The finely focused ion beam can produce patterns by local physical sputtering or through implant damage. These techniques have proven to be valuable for producing submicron superconducting structures in a reliable way.

Paper Details

Date Published: 19 March 1990
PDF: 9 pages
Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); doi: 10.1117/12.965165
Show Author Affiliations
L. R. Harriott, AT&T Bell Laboratories (United States)

Published in SPIE Proceedings Vol. 1187:
Processing of Films for High Tc Superconducting Electronics
T. Venkatesan, Editor(s)

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