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Proceedings Paper

Normal Incidence X-UV Mirrors
Author(s): Charles M. Falco; Felix E. Fernandez; P. Dhez; A. Khandar-Shahabad; L. Nevot; B. Pardo; J. Corno
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Paper Abstract

We describe the fabrication procedure as well as results of an extensive series of characterization measurements, model-fitting and synchrotron tests on Si/W multilayers designed as normal-incidence reflectors for -200 Å radiation. Characterization techniques used were low-angle diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, Read camera, transmission electron microscopy and Rutherford backscattering spectroscopy. To our knowledge, this is the first time such a comprehensive set of characterization techniques has been applied to a multilayer x-ray mirror. Reflectances for -200 Å calculated using the results from these various characterization techniques are found to agree very well with measurements obtained with synchrotron radiation.

Paper Details

Date Published: 1 January 1986
PDF: 11 pages
Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); doi: 10.1117/12.964930
Show Author Affiliations
Charles M. Falco, University of Arizona (United States)
Felix E. Fernandez, University of Arizona (United States)
P. Dhez, Universite de Paris XI (France)
A. Khandar-Shahabad, Universite de Paris XI (France)
L. Nevot, Universite de Paris XI (France)
B. Pardo, Universite de Paris XI (France)
J. Corno, Universite de Paris XI (France)

Published in SPIE Proceedings Vol. 0733:
Soft X-Ray Optics and Technology
E. Koch; Guenther A. Schmahl, Editor(s)

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