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Proceedings Paper

Absolute Reflectivity Measurements Of Multilayer Mirrors In The Soft X-Ray Region
Author(s): K. B. Youn; C. Sella; R. Barchewitz; M. Arbaoui; N. Alehyane
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Paper Abstract

Multilayer soft X-ray mirrors were deposited by using a triode dc sputtering system, equipped with an accurate method pf film thickness monitoring which enables the thickness to be controlled with an accuracy of better than 0.1 Å. Absolute reflectivity measurements of Ni-C and W-C multilayers at λ = 44.79 Å (c lea) in the first and second order Bragg Peaks, and at λ = 67.8 Å (B Ka) only in the first order were carried out. The incident beam is previously polarized by two parallel plane multilayer mirrors fixed at an angle close to Brewster's one ( 0 = 45°). Thus the measured reflectivitie are not affected by a progressive variation of the P component. The preliminary results obtained at λ = 113 Å (BeKot) are also presented.

Paper Details

Date Published: 1 January 1986
PDF: 8 pages
Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); doi: 10.1117/12.964927
Show Author Affiliations
K. B. Youn, CNRS (France)
C. Sella, CNRS (France)
R. Barchewitz, Universite Pierre et Marie Curie (France)
M. Arbaoui, Universite Pierre et Marie Curie (France)
N. Alehyane, Universite Pierre et Marie Curie (France)

Published in SPIE Proceedings Vol. 0733:
Soft X-Ray Optics and Technology
E. Koch; Guenther A. Schmahl, Editor(s)

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