Share Email Print

Proceedings Paper

A High Resolution Coordinate Measuring Machine for the Testing of X-Ray-Mirrors
Author(s): K. Becker; E. Heynacher
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

For the purpose of detecting tangent errors down to 0,1 arc sec on x-ray-mirrors, a computer controlled 3-axis coordinate measurement machine (CMM) has been developed which allows a position resolution of 10 nm in all coordinates. The concept of this CMM is based on the complete separation of machine controlling and measuring systems. Thus the measurements are not related the quality of machine axis but to the quality of reference mirrors which form normals for the three coordinate axes. Experiments performed until now show a reproducibility of better than 0,1 arc sec for linear measurements. Measurements of three dimensional structures are in preparation.

Paper Details

Date Published: 1 January 1986
PDF: 7 pages
Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); doi: 10.1117/12.964905
Show Author Affiliations
K. Becker, Carl Zeiss (Germany)
E. Heynacher, Carl Zeiss (Germany)

Published in SPIE Proceedings Vol. 0733:
Soft X-Ray Optics and Technology
E. Koch; Guenther A. Schmahl, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?