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Proceedings Paper

Recent Developments With Metal-Oxide Multilayered U.V. Mirrors
Author(s): Tran Khanh Vien; J. P. Delaboudiniere; Y. Lepetre
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Paper Abstract

In a previous paper on Si-SiO2 multilayered mirrors (1), we have shown that metal-oxyde systems can be an interesting alternative to metal-metal multilayered coatings for XUV optics in the range from 10 nm to 60 nm. In this paper, we report experimental results of studies made on : a) an Si-Si02 Fabry-Perot etalon b) an Al-Si02 multilayered mirror c) an Al-A1203 multilayered mirror

Paper Details

Date Published: 9 April 1987
PDF: 5 pages
Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); doi: 10.1117/12.964833
Show Author Affiliations
Tran Khanh Vien, Laboratoire de Magnetisme, CNRS (France)
J. P. Delaboudiniere, Laboratoire de Physique Stellaire et Planetaire, CNRS (France)
Y. Lepetre, Argonne National Laboratory (United States)

Published in SPIE Proceedings Vol. 0688:
Multilayer Structures & Laboratory X-Ray Laser Research
Natale M. Ceglio; Pierre Dhez, Editor(s)

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