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Proceedings Paper

TEM and X-Ray Analysis of Multilayer Mirrors and Beamsplitters
Author(s): D. G. Stearns; N. M. Ceglio; A. M. Hawryluk; M. B. Stearns; A. K. Petford-Long; C -H. Chang; K. Danzmann; M. Kuhne; P. Muller; B. Wende
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Paper Abstract

Recent advances in the development of lasers at soft x-ray wavelengths has spurred increasing interest in the production of cavity components using multilayer technology. We have established a comprehensive capability to design, fabricate, and characterize multilayer x-ray optics directed towards the goal of building the first x-ray laser cavity. High quality multilayer structures have been fabricated using magnetron sputtering. In addition, we have applied microfabrication technology to create freestanding beamsplitters and three-dimensional diffracting structures, as is discussed in another paper at this conference. The x-ray reflectivity and transmission of the multilayer components have been measured using synchrotron radiation. We have also characterized the microstructure of these devices using high-resolution transmission electron microscopy (TEM). This information provides structural parameters that are incorporated into computer codes to calculate the theoretical performance of the multilayer components. Comparison of the calculated reflectivity and transmission with the measured performance of the multilayer optics provides insight into the physics of these devices. In addition, a successful modeling capability allows us to iterate the fabrication cycle, modifying the design of the multilayer components to optimize their performance.

Paper Details

Date Published: 9 April 1987
PDF: 8 pages
Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); doi: 10.1117/12.964827
Show Author Affiliations
D. G. Stearns, University of California (United States)
N. M. Ceglio, University of California (United States)
A. M. Hawryluk, University of California (United States)
M. B. Stearns, Arizona State University (United States)
A. K. Petford-Long, Arizona State University (United States)
C -H. Chang, Arizona State University (United States)
K. Danzmann, Institute Berlin (Germany)
M. Kuhne, Institute Berlin (Germany)
P. Muller, Institute Berlin (Germany)
B. Wende, Institute Berlin (Germany)

Published in SPIE Proceedings Vol. 0688:
Multilayer Structures & Laboratory X-Ray Laser Research
Natale M. Ceglio; Pierre Dhez, Editor(s)

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