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Proceedings Paper

An Optical Lever For The Metrology Of Grazing Incidence Optics
Author(s): Alan E. DeCew Jr.; Robert W. Wagner
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Paper Abstract

Research Optics & Development, Inc. is using a slope tracing profilometer to measure the figure of optical surfaces which cannot be measured conveniently by interferometric means. As a metrological tool, the technique has its greatest advantage as an in-process easurement system. An optician can easily convert from polishing to measurement in less than a minute of time. This rapid feedback allows figure correction with minimal wasted effort and setup time. The present configuration of the slope scanner provides resolutions to 1 micro-radian. By implementing minor modifications, the resolution could be improved by an order of magnitude.

Paper Details

Date Published: 3 November 1986
PDF: 6 pages
Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); doi: 10.1117/12.964498
Show Author Affiliations
Alan E. DeCew Jr., Research Optics & Development, Inc. (United States)
Robert W. Wagner, University of Massachusetts (United States)

Published in SPIE Proceedings Vol. 0645:
Optical Manufacturing, Testing and Aspheric Optics
Gregory M. Sanger, Editor(s)

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