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Proceedings Paper

Stability Of Multilayers At High Temperatures
Author(s): E. Ziegler; Y. Lepetre; Ivan K. Schuller; E. Spiller
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Paper Abstract

The temperature stability of metal (W, WRe, Co, Cr)-carbon multilayers has been studied using X-ray diffraction (θ-2θ and Debye-Scherrer) and electron microscopy. The results show that in all cases a crystallization occurs in the temperature range 650-750°C. As a consequence of this crystallization, the layered structure is destroyed, the surface of the film becomes rough and the X-ray reflectivity is considerably reduced. These results imply that efficient cooling or new multilayer structures will have to be developed for use at high temperatures or under high X-ray incident flux.

Paper Details

Date Published: 21 October 1986
PDF: 4 pages
Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); doi: 10.1117/12.964367
Show Author Affiliations
E. Ziegler, Argonne National Laboratory (United States)
Y. Lepetre, Argonne National Laboratory (United States)
Ivan K. Schuller, Argonne National Laboratory (United States)
E. Spiller, IBM Watson Research Center (United States)

Published in SPIE Proceedings Vol. 0640:
Grazing Incidence Optics
John F. Osantowski; Leon P. Van Speybroeck, Editor(s)

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