Share Email Print

Proceedings Paper

X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation
Author(s): Fumio Kokai; Hideaki Saito; Tomoo Fujioka
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The chemical structures of polyimide(PI) and polyethylene terephthalate) (PET) surfaces after ablation with a single laser pulse from a KrF excimer laser are studied by x-ray photoelectron spectroscopy(XPS). For both polymers, carbon-rich surfaces with a modified bonding environment are found to be produced. The formation mechanisms of these surfaces are discussed in terms of the etching processes based on the preferential bond breaking between the aromatic rings and imide groups in PI and between the aromatic ring and carbonyl groups in PET, followed by rearrangement and recombination reactions. Furthermore, as a result of angular-dependent XPS studies/ the changes in atomic concentration and bonding environment along a 4~º100Å depth of the surfaces remaining after ablation are observed. The possibility of surface oxidation after ablation is discussed.

Paper Details

Date Published: 23 February 1990
PDF: 9 pages
Proc. SPIE 1190, Laser/Optical Processing of Electronic Materials, (23 February 1990); doi: 10.1117/12.963982
Show Author Affiliations
Fumio Kokai, Institute for Research and Innovation (Japan)
Hideaki Saito, Institute for Research and Innovation (Japan)
Tomoo Fujioka, Institute for Research and Innovation (Japan)

Published in SPIE Proceedings Vol. 1190:
Laser/Optical Processing of Electronic Materials
Jagdish Narayan, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?