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Proceedings Paper

Application of the Raman Microprobe Mole to the Characterization of Microelectronic Materials and the Analysis of Manufacturing Defects
Author(s): Fran Adar
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Paper Abstract

The Raman Microprobe MOLE provides the capability to acquire analytical quality Raman spectra with him spatial resolution. These spectra allow molecular and/or crystalline identification for contaminant analysis and microstructural studies. The ability of the Raman microprobe to identify organic contaminants is unique in the arsenal of analytical tools available in the manufacture of integrated circuits. Structural studies of materials undergoing engineering development include semiconductor superlattices, superconductors, diamond and diamond-like carbon (DLC) films.

Paper Details

Date Published: 5 February 1990
PDF: 17 pages
Proc. SPIE 1186, Surface and Interface Analysis of Microelectronic Materials Processing and Growth, (5 February 1990); doi: 10.1117/12.963920
Show Author Affiliations
Fran Adar, Instruments, S.A., Inc. (United States)


Published in SPIE Proceedings Vol. 1186:
Surface and Interface Analysis of Microelectronic Materials Processing and Growth
Leonard J. Brillson; Fred H. Pollak, Editor(s)

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