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Proceedings Paper

IN-SITU Diagnostics For Deposition And Processing Of High Tc Superconducting Thin Films
Author(s): T. Venkatesan
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Paper Abstract

The deposition of high quality superconducting thin films based on the metal oxides has given rise to a variety of needs for diagnostic techniques. These needs are primarily for monitoring, 1. the material ejection process from the target, 2. the ejected vapor interaction with the background oxygen, 3. the crystallization dynamics at the substrate and 4. post deposition analysis and processing of the film. This paper summarizes some of the recent work in this direction

Paper Details

Date Published: 5 February 1990
PDF: 9 pages
Proc. SPIE 1186, Surface and Interface Analysis of Microelectronic Materials Processing and Growth, (5 February 1990); doi: 10.1117/12.963918
Show Author Affiliations
T. Venkatesan, Bellcore (United States)


Published in SPIE Proceedings Vol. 1186:
Surface and Interface Analysis of Microelectronic Materials Processing and Growth
Leonard J. Brillson; Fred H. Pollak, Editor(s)

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