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Proceedings Paper

Error Analysis For Anisotropic Compensator Defects For Null Ellipsometry
Author(s): Soe-Mie F. Nee
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Paper Abstract

For null ellipsometry, error equations for polarizer and analyzer angles are formulated in terms of the anisotropic defect parameters of the compensator. Errors of δ ψ and δ Δ for dielectric samples are about the same as those for the straight-through case. Explicit analytical solutions of 8v and So for metallic samples are derived in terms of the anisotropic retardations with large deviations from quarter-wave. The analytical solutions agree with the results obtained from the direct computer simulation of the null ellipsometer as well as with the numerical solutions for the error equations.

Paper Details

Date Published: 25 January 1990
PDF: 12 pages
Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); doi: 10.1117/12.962895
Show Author Affiliations
Soe-Mie F. Nee, Naval Weapons Center (United States)

Published in SPIE Proceedings Vol. 1166:
Polarization Considerations for Optical Systems II
Russell A. Chipman, Editor(s)

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