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Proceedings Paper

Application And Verification Of Wavelength Scaling For Near Specular Scatter Predictions
Author(s): Cynthia L. Vernold
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Paper Abstract

When performing scatter measurements, it is always difficult to acquire accurate scatter data close to the specular beam. Most scatterometers are unable to obtain scatter information closer than one or two degrees from specular. In nearly all cases finite detector apertures and instrument background levels are the limiting factors. Since it is impossible to obtain infinitely small detector apertures or scatter-free system optics, an alternative approach to this problem must be used. A wavelength scaling law based on Fourier theory offers such an approach. This paper presents wavelength scaling data with test wavelengths ranging from 0.325 to 10.6 gm. Upon verifying wavelength scaling over common spatial frequency bandwidths, it is shown that scattering information at small angles from specular can be predicted with a high degree of confidence.

Paper Details

Date Published: 2 January 1990
PDF: 13 pages
Proc. SPIE 1165, Scatter from Optical Components, (2 January 1990); doi: 10.1117/12.962833
Show Author Affiliations
Cynthia L. Vernold, The Perkin-Elmer Corporation (United States)

Published in SPIE Proceedings Vol. 1165:
Scatter from Optical Components
John C. Stover, Editor(s)

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