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Proceedings Paper

Enhancement Of The Reflectivity Of Multilayer X-Ray Mirrors By Ion Polishing
Author(s): Eberhard Spiller
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Paper Abstract

The performance of multilayer x-ray mirrors is improved by smoothing the boundaries within the multilayer stack with ion bombardment at grazing angles of incidence. The process is applied to Co-C and to RhRu-C mirrors for normal incidence telescopes at λ = 64 and λ = 114Å and the reflectivity is increased by a factor of two in both cases. Accumulation of roughness during deposition is eliminated.

Paper Details

Date Published: 28 July 1989
PDF: 9 pages
Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); doi: 10.1117/12.962651
Show Author Affiliations
Eberhard Spiller, IBM Research Division (United States)

Published in SPIE Proceedings Vol. 1160:
X-Ray/EUV Optics for Astronomy and Microscopy
Richard B. Hoover, Editor(s)

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