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Proceedings Paper

Fabrication Of Supersmooth Spherical Quartz Blank For Soft X-Ray Synchrotron Radiation Grating Monochromator In China
Author(s): Zhou Changxin; Shu Deming; Liu Wuming
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Paper Abstract

A spherical grating monochromator (SGM) has been designed and installed in beamline 48913 at Beijing Electron Positron Collider (BEPC) for synchrotron radiation soft x-ray photoemission experiments. There are four laminar gratings in this monochromator to covering the region of 10 -1100ev. On three of them, which covering the soft x-ray range, a supersmooth blank surface with large radial (57M) and high figuring accuracy (>λ/50) is required to suit the monochromator high resolving power desgn (>2000) and reduce the beam power loss. In this paper, the methods of fabrication and metrology has been described, the test results of this plank using WYKO and ZYGO show that the surface roughness of this blank is about 2Å RMS with 0.014 figure tolerance.

Paper Details

Date Published: 28 July 1989
PDF: 11 pages
Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); doi: 10.1117/12.962640
Show Author Affiliations
Zhou Changxin, Changchun Institute of Optics and Fine Mechanics Academia Sinica (China)
Shu Deming, Institute of High Energy Physics Academia Sinica (China)
Liu Wuming, Institute of High Energy Physics Academia Sinica (China)

Published in SPIE Proceedings Vol. 1160:
X-Ray/EUV Optics for Astronomy and Microscopy
Richard B. Hoover, Editor(s)

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