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Proceedings Paper

Development Of Large CCD Arrays With Enhanced UV Performance
Author(s): Richard H. Varian; A. Russell Schaefer; John Cover; James R. Janesick; Richard Bredthauer
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Paper Abstract

In support of programs in surveillance, star tracking and the use of intensified sensors, a series of CCD activities were begun in 1984 by Science Applications International Corporation. They now include the 1989 company-funded development of 1024 x 1024, 18 micron pixel CCD's, benefiting from technology transfer from JPL, and fabricated for SAIC by Ford Aerospace. The result has been a most successful series of CCD's and continued SAIC investment in 1) augmentations of the original Multi-Pinned Phase (MPP) version, 2) the first wafer configuration and funding commitment for Open-Pinned-Phase (OPP) (invented by J. Janesick), and now the configuration of a variety of larger and smaller versions of 18 micron pixel MPP CCD's, to be operated with either front- or back-illumination. This paper surveys activities which are now leading toward reduced noise and toward improved visible region QE and toward the acquisition of UV/Xray responsivity coupled with the features of the MPP CCD's.

Paper Details

Date Published: 28 December 1989
PDF: 20 pages
Proc. SPIE 1158, Ultraviolet Technology III, (28 December 1989); doi: 10.1117/12.962549
Show Author Affiliations
Richard H. Varian, Science Applications International Corporation (United States)
A. Russell Schaefer, Science Applications International Corporation (United States)
John Cover, Science Applications International Corporation (United States)
James R. Janesick, California Institute of Technology (United States)
Richard Bredthauer, Ford Aerospace Corporation (United States)

Published in SPIE Proceedings Vol. 1158:
Ultraviolet Technology III
Robert E. Huffman, Editor(s)

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