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Proceedings Paper

Acoustic Microscropy As A Diagnostic Tool For CVD Diamond Films
Author(s): A. Koumvakalis; R. C. Addison Jr.
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Paper Abstract

Using acoustic microscopy, we have examined polycrystalline diamond films grown by the CVD process on silicon substrates. This technique enables nondestructive characterization of these films with regard to their grain size, stress patterns and boundary anomalies between the film and the substrate. We have used a scanning acoustic microscope (SAM) to characterize several diamond films grown on silicon substrates at Crystallume and at ASTEX Co. The film thicknesses ranged from 1 μm to 100 μm with nominal grain sizes from 0.3 to 8 μm. Results will be presented showing various microstructural features in the films.

Paper Details

Date Published: 15 January 1989
PDF: 9 pages
Proc. SPIE 1146, Diamond Optics II, (15 January 1989); doi: 10.1117/12.962066
Show Author Affiliations
A. Koumvakalis, Rocketdyne Division/ Rockwell International (United States)
R. C. Addison Jr., Rockwell Science Center (United States)

Published in SPIE Proceedings Vol. 1146:
Diamond Optics II
Albert Feldman; Sandor Holly, Editor(s)

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