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Proceedings Paper

Diamond Synthesis By DC Plasma Jet CVD
Author(s): M. Kawarada; K. Kurihara; K. Sasaki; A. Teshima; K. Koshino
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Paper Abstract

We developed a high-speed diamond synthesis technique called DIA-JET process that uses a DC plasma jet. Diamond is made by spraying the plasma jet (generated from the DC arc discharge) onto a water-cooled substrate. After examining the film with X-ray diffraction, Vickers hardness, and Raman scattering, we found that the quality approximated that of natural diamond. This paper describes the properties of the plasma jet and the synthesized diamond.

Paper Details

Date Published: 15 January 1989
PDF: 9 pages
Proc. SPIE 1146, Diamond Optics II, (15 January 1989); doi: 10.1117/12.962059
Show Author Affiliations
M. Kawarada, Fujitsu Laboratories Ltd (Japan)
K. Kurihara, Fujitsu Laboratories Ltd (Japan)
K. Sasaki, Fujitsu Laboratories Ltd (Japan)
A. Teshima, Fujitsu Laboratories Ltd (Japan)
K. Koshino, Fujitsu Laboratories Ltd (Japan)

Published in SPIE Proceedings Vol. 1146:
Diamond Optics II
Albert Feldman; Sandor Holly, Editor(s)

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