Share Email Print

Proceedings Paper

A New Fabrication Process For Compact Disk
Author(s): P. Briaud; R. E. Revay; L. Le Dreau
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Grooved glass substrates for use in media directly readable with optical disks players (CD-audio,CD-ROM, WORM or erasable disks) are fabricated with conventional UV photolithography and etching techniques. The mask preparation is made by compact disk mastering equipment. After exposure and development of the photoresist, etching of the glass disk is done. The quality of the replication and of the etching process can be judged only by the undamental quality criteria (block error rate) of the compact disk. If any region of the replica is unacceptable, the disk must be rejected.

Paper Details

Date Published: 11 October 1989
PDF: 9 pages
Proc. SPIE 1138, Optical Microlithography and Metrology for Microcircuit Fabrication, (11 October 1989); doi: 10.1117/12.961743
Show Author Affiliations
P. Briaud, DIGIPRESS (France)
R. E. Revay, DIGIPRESS (France)
L. Le Dreau, DIGIPRESS (France)

Published in SPIE Proceedings Vol. 1138:
Optical Microlithography and Metrology for Microcircuit Fabrication
Michel J. Lacombat; Stefan Wittekoek, Editor(s)

© SPIE. Terms of Use
Back to Top